JPS62128200U - - Google Patents
Info
- Publication number
- JPS62128200U JPS62128200U JP1653086U JP1653086U JPS62128200U JP S62128200 U JPS62128200 U JP S62128200U JP 1653086 U JP1653086 U JP 1653086U JP 1653086 U JP1653086 U JP 1653086U JP S62128200 U JPS62128200 U JP S62128200U
- Authority
- JP
- Japan
- Prior art keywords
- oil diffusion
- diffusion pump
- intermediate chamber
- oil
- pumps
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 11
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1653086U JPS62128200U (enExample) | 1986-02-07 | 1986-02-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1653086U JPS62128200U (enExample) | 1986-02-07 | 1986-02-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62128200U true JPS62128200U (enExample) | 1987-08-13 |
Family
ID=30808469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1653086U Pending JPS62128200U (enExample) | 1986-02-07 | 1986-02-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62128200U (enExample) |
-
1986
- 1986-02-07 JP JP1653086U patent/JPS62128200U/ja active Pending