JPS62127741U - - Google Patents
Info
- Publication number
- JPS62127741U JPS62127741U JP1339386U JP1339386U JPS62127741U JP S62127741 U JPS62127741 U JP S62127741U JP 1339386 U JP1339386 U JP 1339386U JP 1339386 U JP1339386 U JP 1339386U JP S62127741 U JPS62127741 U JP S62127741U
- Authority
- JP
- Japan
- Prior art keywords
- pallet
- return device
- processing station
- pallet return
- conveyor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Automatic Assembly (AREA)
- Feeding Of Workpieces (AREA)
- Multi-Process Working Machines And Systems (AREA)
- Intermediate Stations On Conveyors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1339386U JPS62127741U (sv) | 1986-02-01 | 1986-02-01 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1339386U JPS62127741U (sv) | 1986-02-01 | 1986-02-01 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62127741U true JPS62127741U (sv) | 1987-08-13 |
Family
ID=30802414
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1339386U Pending JPS62127741U (sv) | 1986-02-01 | 1986-02-01 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62127741U (sv) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01209737A (ja) * | 1988-02-17 | 1989-08-23 | Teru Kyushu Kk | 基板処理装置及び基板処理方法 |
WO2004026738A1 (ja) * | 2002-09-02 | 2004-04-01 | Tani Denkikogyo Co.,Ltd. | 搬送装置 |
JP2021038068A (ja) * | 2019-09-03 | 2021-03-11 | キヤノン株式会社 | 加工システム、および物品の製造方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS575117A (en) * | 1980-06-11 | 1982-01-11 | Hitachi Ltd | Truck |
-
1986
- 1986-02-01 JP JP1339386U patent/JPS62127741U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS575117A (en) * | 1980-06-11 | 1982-01-11 | Hitachi Ltd | Truck |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01209737A (ja) * | 1988-02-17 | 1989-08-23 | Teru Kyushu Kk | 基板処理装置及び基板処理方法 |
WO2004026738A1 (ja) * | 2002-09-02 | 2004-04-01 | Tani Denkikogyo Co.,Ltd. | 搬送装置 |
JPWO2004026738A1 (ja) * | 2002-09-02 | 2006-01-12 | 谷電機工業株式会社 | 搬送装置 |
JP4639377B2 (ja) * | 2002-09-02 | 2011-02-23 | 谷電機工業株式会社 | 搬送装置 |
JP2021038068A (ja) * | 2019-09-03 | 2021-03-11 | キヤノン株式会社 | 加工システム、および物品の製造方法 |
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