JPS62127741U - - Google Patents

Info

Publication number
JPS62127741U
JPS62127741U JP1339386U JP1339386U JPS62127741U JP S62127741 U JPS62127741 U JP S62127741U JP 1339386 U JP1339386 U JP 1339386U JP 1339386 U JP1339386 U JP 1339386U JP S62127741 U JPS62127741 U JP S62127741U
Authority
JP
Japan
Prior art keywords
pallet
return device
processing station
pallet return
conveyor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1339386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1339386U priority Critical patent/JPS62127741U/ja
Publication of JPS62127741U publication Critical patent/JPS62127741U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Automatic Assembly (AREA)
  • Feeding Of Workpieces (AREA)
  • Multi-Process Working Machines And Systems (AREA)
  • Intermediate Stations On Conveyors (AREA)
JP1339386U 1986-02-01 1986-02-01 Pending JPS62127741U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1339386U JPS62127741U (enExample) 1986-02-01 1986-02-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1339386U JPS62127741U (enExample) 1986-02-01 1986-02-01

Publications (1)

Publication Number Publication Date
JPS62127741U true JPS62127741U (enExample) 1987-08-13

Family

ID=30802414

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1339386U Pending JPS62127741U (enExample) 1986-02-01 1986-02-01

Country Status (1)

Country Link
JP (1) JPS62127741U (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01209737A (ja) * 1988-02-17 1989-08-23 Teru Kyushu Kk 基板処理装置及び基板処理方法
WO2004026738A1 (ja) * 2002-09-02 2004-04-01 Tani Denkikogyo Co.,Ltd. 搬送装置
JP2021038068A (ja) * 2019-09-03 2021-03-11 キヤノン株式会社 加工システム、および物品の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS575117A (en) * 1980-06-11 1982-01-11 Hitachi Ltd Truck

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS575117A (en) * 1980-06-11 1982-01-11 Hitachi Ltd Truck

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01209737A (ja) * 1988-02-17 1989-08-23 Teru Kyushu Kk 基板処理装置及び基板処理方法
WO2004026738A1 (ja) * 2002-09-02 2004-04-01 Tani Denkikogyo Co.,Ltd. 搬送装置
JPWO2004026738A1 (ja) * 2002-09-02 2006-01-12 谷電機工業株式会社 搬送装置
JP4639377B2 (ja) * 2002-09-02 2011-02-23 谷電機工業株式会社 搬送装置
JP2021038068A (ja) * 2019-09-03 2021-03-11 キヤノン株式会社 加工システム、および物品の製造方法

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