JPS62127731U - - Google Patents
Info
- Publication number
- JPS62127731U JPS62127731U JP1986015299U JP1529986U JPS62127731U JP S62127731 U JPS62127731 U JP S62127731U JP 1986015299 U JP1986015299 U JP 1986015299U JP 1529986 U JP1529986 U JP 1529986U JP S62127731 U JPS62127731 U JP S62127731U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- surface plates
- processed
- sun gear
- internal gear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 5
- 239000002131 composite material Substances 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 2
- 239000012212 insulator Substances 0.000 claims description 2
- 230000005611 electricity Effects 0.000 claims 1
- 239000003792 electrolyte Substances 0.000 claims 1
- 239000012050 conventional carrier Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986015299U JPS62127731U (enrdf_load_stackoverflow) | 1986-02-04 | 1986-02-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986015299U JPS62127731U (enrdf_load_stackoverflow) | 1986-02-04 | 1986-02-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62127731U true JPS62127731U (enrdf_load_stackoverflow) | 1987-08-13 |
Family
ID=30806100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986015299U Pending JPS62127731U (enrdf_load_stackoverflow) | 1986-02-04 | 1986-02-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62127731U (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006053965A (ja) * | 2004-08-10 | 2006-02-23 | Fuji Electric Device Technology Co Ltd | 磁気記録媒体用基板の製造方法並びにそれに用いる両面研磨装置及び基板研磨用キャリア |
| JP2011035023A (ja) * | 2009-07-30 | 2011-02-17 | Nippon Steel Corp | 半導体基板の研磨方法及び研磨装置 |
-
1986
- 1986-02-04 JP JP1986015299U patent/JPS62127731U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006053965A (ja) * | 2004-08-10 | 2006-02-23 | Fuji Electric Device Technology Co Ltd | 磁気記録媒体用基板の製造方法並びにそれに用いる両面研磨装置及び基板研磨用キャリア |
| JP2011035023A (ja) * | 2009-07-30 | 2011-02-17 | Nippon Steel Corp | 半導体基板の研磨方法及び研磨装置 |