JPS62127206A - Cutting system - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a cutting method using an ID blade, and particularly to a method for slicing hard and brittle materials.

[Conventional technology]

Cutting with ID blades is well known. FIG. 3 shows the area around the center entrance part 2 of the annular ID blade 1.
A base 1 made of a thin metal plate is held at its outer periphery and kept flat in a tensioned state by applying tension outward, and a diamond grindstone portion 4 is attached to the inner periphery 3. Cutting is performed by rotating this at high speed as indicated by arrow 5, inserting the material to be cut 6 into opening 2, and feeding it in the direction of arrow 7.

Alternatively, the material to be cut 6 may be kept stationary and the rotating ID blade may be sent in the direction of the arrow 8. Since the important point is the relative relationship between the two, the feeding will be explained below using the arrow 8 for convenience.

The materials to be cut are often in demand for cutting semiconductors such as Si or glass, and as shown in Figure 3, a cylindrical material with a cross section of 6 is often sliced into thin plates.
A cylinder of single crystal with a diameter of 150mm is sliced into thin plates with a thickness of 1 piece or less.

Reference numeral 9 denotes a support piece made of graphite or the like, which is glued along the generatrix of the cylinder over the entire length of the cylindrical material to be cut 6.

FIG. 4 shows a state in which cutting progresses according to feed 8 from position l1110 on the inner peripheral edge of the ID blade.

At position 11 on the inner peripheral edge, the upper part of the curve NlAl1 is already cut, and the lower part is uncut. 11 sequentially according to the following feed
, 12, 13. The process progresses as follows, and the cutting is completed when it reaches 15.

At the time of completion of cutting, the support piece 9 is also slightly cut, but the cut thin plate remains bonded over the entire width of the support piece 9 between 16 and 17. A large number of thin plates separated by repeated cutting remain on the support piece 9 in a comb-like shape and are useful for subsequent handling.

The above is a commonly used cutting method using an ID blade. The ID blade is a type of diamond wheel, and during the cutting process, the grinding wheel 4 on the inner circumference grinds away the material to be cut and digs a groove with a width corresponding to the thickness of the material. be. The cutting edge that performs the grinding action is the inner circumferential surface of the grindstone portion 4, and the relationship between this working surface and the workpiece 6 is shown in FIG. 4, 11.
Contact is made along the arc of 12.... The length of contact is generally long except at the beginning and end of cutting, and the maximum length is 6
longer than the diameter of

In other words, this cutting method has a drawback in that the cutting resistance, which is proportional to the contact length, is high. Moreover, long contact lengths have the following disadvantages.

The contact surface between the ID blade edge and the material to be cut is the bottom of a narrow and deep groove, and since the blade is fitted into the groove, it is difficult for cooling water to reach the contact surface. It becomes more difficult to distribute cooling water to the contact surface that is in strong pressure contact with the material in proportion to the contact length. As a result, chips are not smoothly removed, the blade edge becomes clogged, and the temperature of the contact portion increases, degrading the grinding performance of the ID blade.

These phenomena further increase the already high cutting resistance, causing the ID blade, which remains flat due to tension, to curve, thereby impairing the flatness of the cut surface. When cutting a thin plate, flatness and parallelism are important for the quality of the obtained thin plate, and the above-mentioned process causes these to exceed allowable values, which ends the life of the ID blade. That is, in this cutting method, the quality of the thin plate of the cut product deteriorates, and the life of the ID blade is also short.

In order to overcome the above-mentioned difficulties, the material to be cut 6 is
A cutting method has been proposed in which the cylinder rotates around its cylindrical axis. In FIG. 4, at the start of cutting, the length of contact between the inner circumference of the blade 10 and the material to be cut 6 is extremely short, but it can be considered that this contact state continues until the end of cutting as the blade 6 rotates. FIG. 5 shows a state in which the feed has progressed to near the center of the material 6 to be cut, and the inner circumferential circle of the blade is at position 20. If 6 is not rotated, the contact length is 21,2
The curve becomes 2.23, which is extremely long as described above, but if rotation is also used, the uncut portion already has a small diameter of 24, so the contact length is still extremely short.

Due to the above-mentioned reasons, the rotary cutting method has low cutting resistance, and the cutting quality of the obtained thin plate, such as flatness and parallelism, is good, and the feed speed can be increased to improve work efficiency, and the life of the ID blade is also shortened. It has been proven that it lasts a long time.

[Problem that the invention seeks to solve]

Despite the above-mentioned advantages, the rotary cutting method also has certain drawbacks, so its practical use is limited, and the cutting methods shown in Figures 3 and 4, which do not rotate the material to be cut, are still most commonly used. .

The problem is that the support piece 9 does not serve any purpose.

This is because even if the support piece 9 is used, it will be cut and separated together with the thin plate due to rotation. When the cutting is completed, the thin plate loses its support and falls, and as it rotates at high speed, there is a risk that it will come into contact with the blade or the blade retention tension mechanism and be damaged. Even if measures are taken to safely recover the cut thin plates to prevent this, the following problems still remain.

In the state shown in FIG. 5, the part of the workpiece 6 other than the central part 24 has already been cut into a thin plate, which is supported by the base material at the part 24. When the cutting is nearing completion, the uncut part 2
4 has an extremely small diameter, cannot withstand the cutting resistance, and breaks to separate the thin plates. In other words, a protrusion as a break mark remains in the center of the thin plate, which is a decisive defect in thin plate products that require uniformity over the entire surface.

[Means for solving problems]

An object of the present invention is to provide a cutting method which has the advantage of short contact length in the method of rotating the material to be cut, and which also ensures the retention of the cut thin plate and does not create breakage marks in the center of the thin plate.

In the cutting method of the present invention, the material to be cut is also rotated, but instead of continuous rotation in the conventional method, it is rotated back and forth within a predetermined angular range. That is, as shown in FIG. 1, a support piece 9 is bonded to the material 6 to be cut, and the support piece 9 rotates reciprocatingly at an angle θ within a range 9.9' that does not touch the inner circumferential circle 4 of the ID blade.

[For production]

When both feeding and rotation are used, the material to be cut is cut along the shoulder line. FIG. 6 is an example of shoulder lines in the case of continuous rotation. If the feed amount per rotation of the material to be cut 6 is F, then
At position 30 on the inner circumference of the blade, the blade makes contact at point A and starts cutting, and after one rotation, the inner circumference becomes position 31 and the arcs A, B, ?
It comes into contact with the material to be cut 6. Since the left and right sides of A and B1 on the inner circumferential circle 31 are already cut and empty, there is no contact. After one more rotation, the contact area on the inner circumferential circle 32 is A2B2
becomes. That is, the line of contact crosses diagonally between the shoulder lines extending from F. If the feed amount F per revolution is reduced, the contact length A1B, etc. will be shortened.

In the method of the present invention, if the reciprocating rotation is performed between the angle θ shown in FIG. Using the same shoulder line as in the diagram, if the forward stroke is the Ishinomaki vortex, the return stroke will be left and right. The distance between adjacent curves is from 0 (zero) to G
Therefore, the contact length with the inner circumferential circle of the blade that diagonally crosses this varies between O (zero) and the maximum, and the average value is small, which satisfies the above-mentioned purpose.

If you look at the material to be cut 6 stationary, the ID blade (inner circumference circle)
While rotating reciprocally through an angle θ, the center moves away from the center of the material to be cut 6 at a rate of G per reciprocation. Let HJKL in FIG. 8 be a part of the locus centered on the inner circumferential circle.

The position of the inner circumferential circle of the blade at the turning point J is 41, and at this time, the uncut portion of the material to be cut 6 is below the curve PQR3 as a boundary. The inner circumferential circle 41 is in contact with the material to be cut over PQ, but since this is the turning point, the inner circumferential circle moves toward 42 as shown by the arrow W when the next turn is made, and the contact is removed. .

FIG. 842 shows the inner circumferential circle when the blade center is at K, and the contact length at this time is short, Dl.

After that, the contact becomes 2D3 from D according to the rotation and feed.
...and the shape cut in this process is Q RiS
It becomes x. The aforementioned curve PQR3, whose explanation is omitted, was also formed in the previous step ending at 11→J by a similar process, and a part of the zigzag pattern in FIG. 7 can be seen in RQR.

The contact length gradually becomes longer as D, D, . The maximum contact length is somewhat large, but it is about 1/2 of the maximum contact length in Figure 4 for non-rotating cutting, and it is also extremely short in some cases, so the average value is much smaller, as shown in Figure 4. The conditions are very advantageous compared to the case where the inner circumferential circle of the blade maintains pressure contact with the material to be cut due to a long contact length. In particular, since the contact is separated at the same time as the contact length reaches its maximum, cooling water can circulate well, chips can be removed effectively, and clogging can be prevented.

〔Example〕

Since the cutting method of the present invention utilizes the advantage of rotating the material to be cut, the larger the angular range of reciprocating rotation, the more advantageous it is. This angular range is limited by the condition that the support piece 9 is not cut. At the initial stage of cutting, the angle range can exceed 180@ as shown in Figure 2 0□, but
It is evident in FIG. 1 that the limiting angle decreases as the cutting progresses. At the end of cutting, the range of reciprocating rotation is 0
It can also be seen from FIG. 4, 15 that the angle is at least extremely small.

In Figure 9, cutting is completed in 10 reciprocations with the feed being 1710 mm, which is the diameter of the material to be cut 6, for one reciprocating rotation, and the rotation angle starts from 200° and decreases by 20° for each reciprocating operation, and becomes O at the end. FIG. If the feed rate is constant, the period of reciprocating rotation will be constant, and the rotation speed will slow down in inverse proportion to the reciprocating angle range. Since the cutting area for one reciprocation becomes smaller with each reciprocation, it will be more efficient to maintain the above-mentioned relative relationship regarding the rotation speed and gradually increase the feed speed.

FIG. 10 is a cutting diagram in the case where the reciprocating rotation angle starts at 200@ and decreases by 20 degrees for each reciprocation, but the feed amount per stroke decreases in proportion to the rotation angle range. Both the feed speed and rotation speed can be kept constant, or they can be increased or decreased while maintaining a constant ratio. In this example, after nine 4.5 reciprocating strokes, the rotation is stopped and cutting is continued by only feeding. The contact length at this time is sufficiently short as seen in the figure.

In order to carry out the cutting method of the present invention, a bearing mechanism that allows the material to be cut to rotate is required, and it is essential for cutting accuracy that the axis of the bearing mechanism be exactly perpendicular to the plate surface of the ID blade. be. This has already been achieved with conventional continuous rotary cutting machines. Feed straightness is also required for the same reason, and is also provided in conventional ID blade cutting machines.

Controlling the reversal of the direction of rotation for reciprocating, its position or time, rotational speed, etc., in connection with the feed, can be performed mechanically, electrically or electronically.

[Effects of the Invention] The cutting method of the present invention has the advantages of the cutting material rotation method, which has high cutting efficiency due to low cutting resistance, high cutting degree such as flatness of the cut surface, and long life of the ID blade. In addition, no protrusion of breakage marks is produced at the center of the cut surface, and as a result, high-quality thin plates of semiconductors, glass, etc. can be manufactured economically. Furthermore, it is possible to precisely cut ceramics, which are difficult to cut, for which demand for cutting has been increasing in recent years, with sufficient profitability, making a great contribution to related industries.

[Brief explanation of drawings]

1 and 2 are explanatory diagrams of the cutting method according to the present invention, FIG. 3 is a sectional view of the center of a conventionally used annular ID blade, FIG. 4 is a diagram showing the cutting state, and FIG. The figure is a cross-sectional view just before cutting is completed. Figure 6 is a sectional view showing an example of the shoulder line in the case of continuous rotation, Figure 7
The figure is a cross-sectional view when reciprocating rotation between angles O, and FIGS. 8 and 9 are views showing cutting loci. Tsuyoshi Eto
fs1 diagram Figure 2 Figure 4 Figure 1 Figure 7 Figure 5 Figure q March 27, 1986

Claims (1)

[Claims] 1. While feeding the material to be cut toward the inner circumferential circle of the ID blade, the material to be cut is simultaneously rotated reciprocally within a limited angular range around an axis perpendicular to the surface of the ID blade. A cutting method characterized by 2. A support piece is attached to the side surface of the material to be cut over the entire length in a direction perpendicular to the cutting surface, and the material to be cut is rotated back and forth within an angular range that is not cut by the ID blade. The cutting method described in Section 1.