JPS62126831U - - Google Patents
Info
- Publication number
- JPS62126831U JPS62126831U JP1525186U JP1525186U JPS62126831U JP S62126831 U JPS62126831 U JP S62126831U JP 1525186 U JP1525186 U JP 1525186U JP 1525186 U JP1525186 U JP 1525186U JP S62126831 U JPS62126831 U JP S62126831U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- generation chamber
- plasma generation
- chamber
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002265 prevention Effects 0.000 claims description 3
- 210000003717 douglas' pouch Anatomy 0.000 claims 1
- 239000012212 insulator Substances 0.000 claims 1
- 238000005530 etching Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 230000005284 excitation Effects 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Control Of Motors That Do Not Use Commutators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986015251U JPH0513005Y2 (id) | 1986-02-04 | 1986-02-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986015251U JPH0513005Y2 (id) | 1986-02-04 | 1986-02-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62126831U true JPS62126831U (id) | 1987-08-12 |
| JPH0513005Y2 JPH0513005Y2 (id) | 1993-04-06 |
Family
ID=30806010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986015251U Expired - Lifetime JPH0513005Y2 (id) | 1986-02-04 | 1986-02-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0513005Y2 (id) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61131450A (ja) * | 1984-11-30 | 1986-06-19 | Canon Inc | ドライエツチング装置 |
-
1986
- 1986-02-04 JP JP1986015251U patent/JPH0513005Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61131450A (ja) * | 1984-11-30 | 1986-06-19 | Canon Inc | ドライエツチング装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0513005Y2 (id) | 1993-04-06 |