JPS62126831U - - Google Patents

Info

Publication number
JPS62126831U
JPS62126831U JP1525186U JP1525186U JPS62126831U JP S62126831 U JPS62126831 U JP S62126831U JP 1525186 U JP1525186 U JP 1525186U JP 1525186 U JP1525186 U JP 1525186U JP S62126831 U JPS62126831 U JP S62126831U
Authority
JP
Japan
Prior art keywords
plasma
generation chamber
plasma generation
chamber
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1525186U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0513005Y2 (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986015251U priority Critical patent/JPH0513005Y2/ja
Publication of JPS62126831U publication Critical patent/JPS62126831U/ja
Application granted granted Critical
Publication of JPH0513005Y2 publication Critical patent/JPH0513005Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Control Of Motors That Do Not Use Commutators (AREA)
  • Drying Of Semiconductors (AREA)
JP1986015251U 1986-02-04 1986-02-04 Expired - Lifetime JPH0513005Y2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986015251U JPH0513005Y2 (cg-RX-API-DMAC10.html) 1986-02-04 1986-02-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986015251U JPH0513005Y2 (cg-RX-API-DMAC10.html) 1986-02-04 1986-02-04

Publications (2)

Publication Number Publication Date
JPS62126831U true JPS62126831U (cg-RX-API-DMAC10.html) 1987-08-12
JPH0513005Y2 JPH0513005Y2 (cg-RX-API-DMAC10.html) 1993-04-06

Family

ID=30806010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986015251U Expired - Lifetime JPH0513005Y2 (cg-RX-API-DMAC10.html) 1986-02-04 1986-02-04

Country Status (1)

Country Link
JP (1) JPH0513005Y2 (cg-RX-API-DMAC10.html)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61131450A (ja) * 1984-11-30 1986-06-19 Canon Inc ドライエツチング装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61131450A (ja) * 1984-11-30 1986-06-19 Canon Inc ドライエツチング装置

Also Published As

Publication number Publication date
JPH0513005Y2 (cg-RX-API-DMAC10.html) 1993-04-06

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