JPS62126283U - - Google Patents

Info

Publication number
JPS62126283U
JPS62126283U JP1379386U JP1379386U JPS62126283U JP S62126283 U JPS62126283 U JP S62126283U JP 1379386 U JP1379386 U JP 1379386U JP 1379386 U JP1379386 U JP 1379386U JP S62126283 U JPS62126283 U JP S62126283U
Authority
JP
Japan
Prior art keywords
liquid passage
substrate
hole
passage recess
holding device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1379386U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0441977Y2 (US06346242-20020212-C00066.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986013793U priority Critical patent/JPH0441977Y2/ja
Publication of JPS62126283U publication Critical patent/JPS62126283U/ja
Application granted granted Critical
Publication of JPH0441977Y2 publication Critical patent/JPH0441977Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Weting (AREA)
JP1986013793U 1986-01-31 1986-01-31 Expired JPH0441977Y2 (US06346242-20020212-C00066.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986013793U JPH0441977Y2 (US06346242-20020212-C00066.png) 1986-01-31 1986-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986013793U JPH0441977Y2 (US06346242-20020212-C00066.png) 1986-01-31 1986-01-31

Publications (2)

Publication Number Publication Date
JPS62126283U true JPS62126283U (US06346242-20020212-C00066.png) 1987-08-11
JPH0441977Y2 JPH0441977Y2 (US06346242-20020212-C00066.png) 1992-10-02

Family

ID=30803189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986013793U Expired JPH0441977Y2 (US06346242-20020212-C00066.png) 1986-01-31 1986-01-31

Country Status (1)

Country Link
JP (1) JPH0441977Y2 (US06346242-20020212-C00066.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63143970A (ja) * 1986-12-09 1988-06-16 Tokyo Electron Ltd 基板載置台

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5982257U (ja) * 1982-11-25 1984-06-02 株式会社東芝 レジスト塗布装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5982257U (ja) * 1982-11-25 1984-06-02 株式会社東芝 レジスト塗布装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63143970A (ja) * 1986-12-09 1988-06-16 Tokyo Electron Ltd 基板載置台

Also Published As

Publication number Publication date
JPH0441977Y2 (US06346242-20020212-C00066.png) 1992-10-02

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