JPS62126248U - - Google Patents

Info

Publication number
JPS62126248U
JPS62126248U JP1362486U JP1362486U JPS62126248U JP S62126248 U JPS62126248 U JP S62126248U JP 1362486 U JP1362486 U JP 1362486U JP 1362486 U JP1362486 U JP 1362486U JP S62126248 U JPS62126248 U JP S62126248U
Authority
JP
Japan
Prior art keywords
cylindrical body
preliminary chamber
chamber
loading
advancing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1362486U
Other languages
English (en)
Japanese (ja)
Other versions
JPH072038Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986013624U priority Critical patent/JPH072038Y2/ja
Publication of JPS62126248U publication Critical patent/JPS62126248U/ja
Application granted granted Critical
Publication of JPH072038Y2 publication Critical patent/JPH072038Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1986013624U 1986-01-31 1986-01-31 真空槽の物品出し入れ装置 Expired - Lifetime JPH072038Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986013624U JPH072038Y2 (ja) 1986-01-31 1986-01-31 真空槽の物品出し入れ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986013624U JPH072038Y2 (ja) 1986-01-31 1986-01-31 真空槽の物品出し入れ装置

Publications (2)

Publication Number Publication Date
JPS62126248U true JPS62126248U (enExample) 1987-08-11
JPH072038Y2 JPH072038Y2 (ja) 1995-01-25

Family

ID=30802859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986013624U Expired - Lifetime JPH072038Y2 (ja) 1986-01-31 1986-01-31 真空槽の物品出し入れ装置

Country Status (1)

Country Link
JP (1) JPH072038Y2 (enExample)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59164696A (ja) * 1983-03-10 1984-09-17 Matsushita Electric Ind Co Ltd 真空容器の搬送装置
JPS61120628A (ja) * 1984-11-16 1986-06-07 Matsushita Electric Ind Co Ltd 真空処理装置
JPS61291032A (ja) * 1985-06-17 1986-12-20 Fujitsu Ltd 真空装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59164696A (ja) * 1983-03-10 1984-09-17 Matsushita Electric Ind Co Ltd 真空容器の搬送装置
JPS61120628A (ja) * 1984-11-16 1986-06-07 Matsushita Electric Ind Co Ltd 真空処理装置
JPS61291032A (ja) * 1985-06-17 1986-12-20 Fujitsu Ltd 真空装置

Also Published As

Publication number Publication date
JPH072038Y2 (ja) 1995-01-25

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