JPS62125408A - Fine adjustment mechanism - Google Patents

Abstract

PURPOSE:To attain the high resistance against the load having high load as well as against the fatigue with high rigidity for a four-joint link fine adjustment mechanism without increasing the thickness of a flucrum part having a notch by providing an elastic body that has the load of the bias force corresponding to an actuator. CONSTITUTION:An actuator 407 is fixed to an end of a fixing part 401 of a four-link mechanism having flucrum parts 402-404 containing notches. A movable part 406 has a fine movement by the expansion and contraction of the actuator 407. A bias coil spring 408 is set at the other end of the part 401 at the side opposite to the actuator 407 of the part 406. Thus a close contact is always secured between the part 406 and the actuator 407 by the compression force of the spring 408. The movement of the part 406 is detected by a displacement detector 409. Then a driving amplifier 412 of the actuator 407 is controlled by an arithmetic controller 411 provided in a controller 410. Thus the part 406 is positioned at a desired point.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a positioning mechanism on the submicron order, and particularly to a fine movement mechanism that has a wide movable range and is suitable for positioning under high loads.

[Background of the invention]

In recent years, the use of semiconductor lasers has been rapidly expanding in fields such as communications and measurement, but for example, in the manufacturing process of laser diodes with single-mode fibers, dimensional accuracy of so-called submicron positioning is required. However, does the operator have experience in aligning the optical axis of the condensing optical fiber? Since much of the process relies on intuition, there was a strong desire for mechanization. Various mechanisms have been proposed for moving the optical fiber for the above-mentioned optical axis alignment, and these
For example, the magazine "Precision Machinery Volume 48 No. 6 734-739
Figure 6 shows what is shown in the paper ``Composite Parallel Spring with Integrated Reduction Mechanism'' published in ``Page 1982''. This consists of an integral four-bar link mechanism with a fixed part 11 and fulcrum parts 12, 13, 14, and 45 having notches, and a linear actuator 17 fixed to the inverted end of the fixed part 11 is connected. Movable part 1 via part 18
It is provided so as to be in contact with 6. Actuator 1
8 and the fulcrum parts 12 , 13 , 14 , 15
By means of a link mechanism with the movable part rotating in opposite corners, the movable part moves in parallel in the direction of the arrow and slightly moves to the position indicated by the dotted line.

The connecting portion 18 between the actuator 17 and the movable portion 16 is such that the movable portion 16 and the actuator 17 are in point contact in order to minimize stress such as torsion and bending caused by external forces such as torsion and bending caused by the operation of the actuator 17. It is preferable that they remain in close contact with each other and remain stationary.

Therefore, in the neutral state indicated by the solid line in the figure, each fulcrum portion 12,
The moments at 13, 14, and 15 are zero and 1, and in this reference, movement is possible only in the direction of the arrow from the neutral state. In addition, when an external load is applied in the A direction, the load from the actuator 17 is added, so the fulcrum part 12
, 13, 14, and 15, it becomes necessary to increase the wall thickness of the fulcrum part, but as the wall thickness increases, the stress generated in the fulcrum parts 12, 13, 14, and 15 also increases. A problem arises in that the permissible limit of the range of motion must be reduced.

[Purpose of the invention]

The present invention was made in order to solve the above-mentioned problems, and it is an object of the present invention to provide a positioning fine movement mechanism that can have a sufficient range of movement, has high rigidity, and can withstand high loads.

[Summary of the invention]

In order to achieve the above-mentioned object, the present invention is characterized in that an elastic body for applying a load to a piascus opposing the actuator is provided on the opposite side of the actuator with the movable part in between.

[Embodiments of the invention]

An overview of the operation of the present invention will be explained with reference to FIGS. 1 and 2. As shown in FIG.
An extension part of the fixing part 11 is provided on the opposite side of the fixing part 7, and an elastic body 21 made of a compression spring is fixed thereto, and the joint part 22 is attached in the opposite direction to the arrow A.
A compressive force is applied to the movable portion 16 via the compressive force. The elastic body 21 and the movable part 22 are in point contact, and the pressing force of the actuator 17 in the direction of arrow A and the pressure force of the elastic body 21 in the opposite direction of arrow A are generated through the connecting part 18 between the actuator 17 and the movable part 16 and the movable part 22. The compressive force in the direction acts on the same line as the compressive force. As a result, no force such as twisting or bending is applied to the movable part.

As a result of the above, the actuator 17 is always connected to the piston 3 in the opposite direction to the arrow A, and even if the end Q of the movable part 16 is at the position Q' as shown in FIG. are in close contact with each other at the connecting portion 18, and the movable range of the movable portion 16 is expanded to Q'Q' as shown by the dotted line in FIG.

Next, an embodiment of the present invention will be explained with reference to FIG.

An actuator 407 is fixed to one end of a fixed part 401 of a four-bar linkage mechanism having fulcrum parts 402 to 404 having notches, and the movable part 4 is expanded and contracted by the actuator 407.
06 moves slightly. Actuator 407 of movable part 406
A biasing Cole spring 408 is provided at the other end of the fixed part 401 on the opposite side, and the movable part 406 and the actuator 407 are always brought into close contact with each other by the compressive force of the spring. Movable VAS4
06 is detected by the displacement detector 409, and the movement of the controller 4 is detected by the displacement detector 409.
The actuator 4 is controlled by the arithmetic and control unit 411 in the
The driving amplifier 412 of 07 is controlled to position the movable part 406 to a required position. Actuator 4
07 is preferably a direct-acting actuator capable of displacement on the micron or submicron order, such as a piezoelectric element or a linear motor, and the control system can be configured using an arithmetic control device.

FIG. 4 is a diagram showing another embodiment of the present invention, in which a plate 508 is used for the load of the pie scan.
Leaf springs are more compact than coil springs and can obtain a large compressive force, so they are suitable for high loads despite being small and lightweight.Figure 5 shows yet another example, with a 1% tortoise magnet 608α and Permanent magnets 608b are installed in series, and the repulsive force between the same poles is used to load the pie scan. In this embodiment, the bias voltage can be adjusted by increasing or decreasing the current to the electromagnet 608α to 0 using a current controller (not shown).

〔Effect of the invention〕

By implementing the present invention, the range of motion has been expanded to more than twice that of the conventional one, and the 4-bar link has high rigidity and is resistant to fatigue. A fine movement mechanism is obtained.

[Brief explanation of drawings]

1 and 2 are diagrams explaining the principle of the present invention, FIG. 6 is an overall configuration diagram of one embodiment of the present invention, FIG. 4 is a diagram of another embodiment of the present invention, and FIG. 5 is a diagram of the present invention. Still another embodiment, FIG. 6, is a diagram showing a conventional fine movement mechanism. 401... Fixed part, 402-405... Fulcrum part, 406... Movable part, 407... Actuator, l108... Coil spring, 409... Displacement detector, 410... Control device , 508... leaf spring, 6
08α...Electromagnet, 608b...Permanent magnet. Representative Patent Attorney Katsutoshi Ogawa No. 12, Part 2, Figure 3, Figure S

Claims (1)

[Claims] A fine movement mechanism characterized in that an actuator is disposed at one end of a movable link facing a fixed link and a compression elastic body is disposed at the other end in a parallel four-bar link having four circular arc-shaped notched fulcrum parts.