JPS62124851U - - Google Patents
Info
- Publication number
- JPS62124851U JPS62124851U JP1037386U JP1037386U JPS62124851U JP S62124851 U JPS62124851 U JP S62124851U JP 1037386 U JP1037386 U JP 1037386U JP 1037386 U JP1037386 U JP 1037386U JP S62124851 U JPS62124851 U JP S62124851U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- spring body
- loading table
- wafer
- optical path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 2
- 230000000903 blocking effect Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1037386U JPS62124851U (sh) | 1986-01-29 | 1986-01-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1037386U JPS62124851U (sh) | 1986-01-29 | 1986-01-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62124851U true JPS62124851U (sh) | 1987-08-08 |
Family
ID=30796600
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1037386U Pending JPS62124851U (sh) | 1986-01-29 | 1986-01-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62124851U (sh) |
-
1986
- 1986-01-29 JP JP1037386U patent/JPS62124851U/ja active Pending