JPS62124848U - - Google Patents
Info
- Publication number
- JPS62124848U JPS62124848U JP214786U JP214786U JPS62124848U JP S62124848 U JPS62124848 U JP S62124848U JP 214786 U JP214786 U JP 214786U JP 214786 U JP214786 U JP 214786U JP S62124848 U JPS62124848 U JP S62124848U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- wafer carrier
- grooves
- rotation axis
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000004677 Nylon Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP214786U JPS62124848U (me) | 1986-01-11 | 1986-01-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP214786U JPS62124848U (me) | 1986-01-11 | 1986-01-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62124848U true JPS62124848U (me) | 1987-08-08 |
Family
ID=30780711
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP214786U Pending JPS62124848U (me) | 1986-01-11 | 1986-01-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62124848U (me) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03156925A (ja) * | 1989-11-15 | 1991-07-04 | Ebara Corp | ウエハキャリヤの精密洗浄方法及び装置 |
-
1986
- 1986-01-11 JP JP214786U patent/JPS62124848U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03156925A (ja) * | 1989-11-15 | 1991-07-04 | Ebara Corp | ウエハキャリヤの精密洗浄方法及び装置 |