JPS62124847U - - Google Patents
Info
- Publication number
- JPS62124847U JPS62124847U JP1218886U JP1218886U JPS62124847U JP S62124847 U JPS62124847 U JP S62124847U JP 1218886 U JP1218886 U JP 1218886U JP 1218886 U JP1218886 U JP 1218886U JP S62124847 U JPS62124847 U JP S62124847U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- gas
- counter electrode
- gas introduction
- introduction channels
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001020 plasma etching Methods 0.000 claims description 3
- 238000007664 blowing Methods 0.000 claims description 2
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1218886U JPS62124847U (zh) | 1986-01-30 | 1986-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1218886U JPS62124847U (zh) | 1986-01-30 | 1986-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62124847U true JPS62124847U (zh) | 1987-08-08 |
Family
ID=30800085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1218886U Pending JPS62124847U (zh) | 1986-01-30 | 1986-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62124847U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03290928A (ja) * | 1990-04-06 | 1991-12-20 | Fuji Electric Co Ltd | 加工方法 |
-
1986
- 1986-01-30 JP JP1218886U patent/JPS62124847U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03290928A (ja) * | 1990-04-06 | 1991-12-20 | Fuji Electric Co Ltd | 加工方法 |