JPS62124373A - Controller - Google Patents

Controller

Info

Publication number
JPS62124373A
JPS62124373A JP26204985A JP26204985A JPS62124373A JP S62124373 A JPS62124373 A JP S62124373A JP 26204985 A JP26204985 A JP 26204985A JP 26204985 A JP26204985 A JP 26204985A JP S62124373 A JPS62124373 A JP S62124373A
Authority
JP
Japan
Prior art keywords
valve
seat
stopper
fluid
valve seat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP26204985A
Other languages
Japanese (ja)
Inventor
Yoshiteru Sonoda
園田 芳輝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP26204985A priority Critical patent/JPS62124373A/en
Publication of JPS62124373A publication Critical patent/JPS62124373A/en
Pending legal-status Critical Current

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  • Electrically Driven Valve-Operating Means (AREA)

Abstract

PURPOSE:To eliminate the leakage of fluid, by providing a valve member formed of piezoelectric ceramics in a casing having a valve seat in a fluid passage, and also providing a seat member adapted to abut against the valve seat of the casing upon expansion of the valve member. CONSTITUTION:A casing 1 includes a fluid passage 7 through which a fluid flows, a valve seat 8 formed in the fluid passage 7, and a valve chamber 9. A valve member 5 is formed of piezoelectric ceramics, and is adapted to be expanded to the valve seat 8 upon application of voltage thereto. A seat member 6 is fixed at the lower end of the valve member 5 in such a manner as to be abuttable against and separatable from the valve seat 8. Thus, the seat member is reliably tightly contacted with the valve seat upon closing of the valve, thereby eliminating the leakage of fluid even under high pressure.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、流体を取扱う装置や機Rg fこ使用される
ものであり、駆動用ンこ電力を使用し、電圧の印加時に
は流路を遮断すると共に、非印加時には流路を開放する
制御器に関する。
Detailed Description of the Invention (Industrial Application Field) The present invention is used in devices and machines that handle fluids, and uses electric power for driving, and when voltage is applied, the flow path is closed. The present invention relates to a controller that shuts off the flow path and opens the flow path when no voltage is applied.

(従来の技術) 一般に、開閉を自動的に行える制御器とじては、ソレノ
イドバルブやダイヤフラムシール型バルブ等が知られて
居シ、前者は例えば自動計測計器等と組合せらhで緊急
に流体を遮断する場合等に使用され、後者は例えば半導
体製造装置や原子力発電プラント等に於ける高純度ガス
を取扱う管路等に使用されている。
(Prior Art) In general, solenoid valves and diaphragm seal type valves are known as controllers that can open and close automatically. The latter is used, for example, in pipelines handling high-purity gas in semiconductor manufacturing equipment, nuclear power plants, etc.

而して、前記各バルブは、駆動部でスピンドルを移動さ
せることにより、栓体やダイヤフラムが栓座へ当座して
閉弁状態となり、又、スプリングの弾性力でスピンドル
を前記と逆方向へ移動させることにより、栓体やダイヤ
フラムが栓座から離座し、開弁状態となる。
By moving the spindle using the drive unit, each of the valves is closed by causing the stopper body or diaphragm to rest against the stopper seat, and the spindle is moved in the opposite direction by the elastic force of the spring. By doing so, the stopper and the diaphragm are separated from the stopper seat, and the valve is in an open state.

然し乍ら、前記ツレ/イドバルブは、駆動力が小さいの
で完全閉止が困難なうえ、スプリングを使用している為
、腐蝕性流体の取扱いには不向きである。又、ダイヤフ
ラムシール型バルブは、ダイヤプラムを使用しているの
で高温、高圧の流体には使用できないうえ、ダイヤプラ
ムが短期IH]で劣化する等の問題がある。更に、前記
各バルブは、スピンドル等を移動させて開閉弁を行う構
成となっている為、jY擦による異物の混入が避けられ
ず、高純度ガスを取扱う管路では、ガスの純度低下を引
き起すという問題がある。そのうえ、各バルブは開弁用
のスプリングを必要とする為、組立が煩雑化すると共に
、t1η造も複雑化し、しかも多量の作動用エネルギー
を消費するという問題がある。
However, since the driving force of the strain/id valve is small, it is difficult to completely close the valve, and since it uses a spring, it is not suitable for handling corrosive fluids. Further, since the diaphragm seal type valve uses a diaphragm, it cannot be used for high temperature and high pressure fluids, and there are problems such as the diaphragm deteriorating due to short-term IH. Furthermore, since each of the above-mentioned valves is configured to open and close by moving the spindle, it is unavoidable that foreign matter is mixed in due to j-y friction, which can lead to a decrease in the purity of the gas in pipelines that handle high-purity gas. There is a problem with waking up. Moreover, since each valve requires a spring for opening the valve, there are problems in that assembly is complicated, t1η construction is also complicated, and a large amount of operating energy is consumed.

(発明が解決しようとする問題点) 本発明は、−1−記の問題点を解消する為に創案された
ものであり、その目的は高純度流体や高圧流体等の取扱
いに適すると共に、効率も極めて良く、組立や構造の簡
略化を図れる制御器を提供するにある。
(Problems to be Solved by the Invention) The present invention was devised to solve the problems described in -1-, and its purpose is to be suitable for handling high-purity fluids, high-pressure fluids, etc., and to improve efficiency. It is an object of the present invention to provide a controller which is extremely efficient and whose assembly and structure can be simplified.

(問題点を解決する為の手段) 本発明の制御器は、流体が流通する流路とその途中に形
成した栓座とを有する箱体と; 箱体内に支持され、電
圧の印加により栓座側へ伸長する圧電セラミック製の栓
体と; 栓体に取付けられ、栓体の伸長時に箱体の栓座
に当座するシート材とから構成したことに特徴がある。
(Means for Solving the Problems) The controller of the present invention includes a box body having a flow path through which fluid flows and a stopper formed in the middle thereof; It is characterized by being composed of a plug made of piezoelectric ceramic that extends to the side; and a sheet material that is attached to the plug and rests on the plug seat of the box when the plug is extended.

(作   用) 111■記制御器は、電圧の非印加時ンこは箱体の栓座
と栓体に取付けたシー]・材との間に間隙があり、開弁
状態になっている。
(Function) In the controller described in 111.1, when no voltage is applied, there is a gap between the stopper seat of the box body and the seal material attached to the stopper body, and the valve is in an open state.

そして、圧電セラミック製の栓体に所定の電圧を印加す
ると、栓体が栓座側へ伸長し、シート材が栓座に密着し
て閉弁状態になる。
When a predetermined voltage is applied to the piezoelectric ceramic stopper, the stopper extends toward the stopper seat, and the sheet material comes into close contact with the stopper seat, resulting in a closed state.

(実 施 例) 以下、本発明の実施例を図面に基づいて詳細に説明する
(Example) Hereinafter, an example of the present invention will be described in detail based on the drawings.

第1図は本発明の第1実施例に係る制御器の縦断面図で
あって、■は箱体、2は支持部材、3はパツキン、4は
ボンネット、5は栓体、6はシート材である。
FIG. 1 is a vertical cross-sectional view of a controller according to a first embodiment of the present invention, where ■ is a box, 2 is a support member, 3 is a packing, 4 is a bonnet, 5 is a stopper, and 6 is a sheet material. It is.

前記箱体1は、セラミックや金属製材料等により作製さ
れて苦り、流体が流通する流路7と、その途中に形成し
た栓座8と、栓座8の上方に形成した栓座9等を備えて
いる。この箱体1の上部には栓座9を密閉状にする支持
部材2がパツキン3を介して嵌着されて居り、該支持部
材2は箱体1に螺符したボンネット4により押圧固定さ
れている。
The box body 1 is made of ceramic, metal, etc., and includes a channel 7 through which fluid flows, a stopper seat 8 formed in the middle of the channel, a stopper seat 9 formed above the stopper seat 8, etc. It is equipped with A support member 2 that seals the stopper 9 is fitted onto the upper part of the box body 1 via a gasket 3, and the support member 2 is pressed and fixed by a bonnet 4 screwed onto the box body 1. There is.

栓体5は、圧電セラミック部材により作製され、箱体1
内に支持されている。即ち、本実施例に於いては、栓体
5は円柱形状を呈し、その外周面が箱体1の栓座9内壁
に非接触状態で収納さJtで1阿り、その上端は支持部
材2に適宜の方法で固着され、その下端は栓座8と対向
している。該栓体5は、電圧を印加したときに栓座8側
へ伸長するように形成されており、又、栓体5の下端に
は栓座8に当離座しく)る金j・【製のシート材6が固
着されていると共に、その上端には電圧を印加する為の
コード10が接続されている。尚、前記栓体5の長さは
、電圧の非印加時には栓座8とシート材6との間に若干
の間隙が形成され、′混圧の印加時にはシート材6が栓
座8へ密着するように選定されている。
The plug body 5 is made of a piezoelectric ceramic member and is attached to the box body 1.
supported within. That is, in this embodiment, the stopper 5 has a cylindrical shape, and its outer peripheral surface is housed in a non-contact state with the inner wall of the stopper 9 of the box 1, and its upper end is connected to the support member 2. The lower end faces the stopper seat 8 by an appropriate method. The stopper 5 is formed so as to extend toward the stopper seat 8 when a voltage is applied, and the lower end of the stopper 5 is made of gold made by J. A sheet material 6 is fixed thereto, and a cord 10 for applying voltage is connected to the upper end of the sheet material 6. The length of the stopper 5 is such that a slight gap is formed between the stopper seat 8 and the sheet material 6 when no voltage is applied, and the sheet material 6 is in close contact with the stopper seat 8 when a mixed pressure is applied. It has been selected as follows.

而して、前記構成の制御器は、電圧の非印加時ンこは栓
座8とシート材6との間に若干の間隙があり、流体は流
路7内な流りている。
In the controller configured as described above, when no voltage is applied, there is a slight gap between the plug seat 8 and the sheet material 6, and the fluid flows in the flow path 7.

そして、栓体5に所定電力(100v、80m*A)を
印加すると、栓体5は栓座8側へ若干It (30〜5
00 ttm )  伸長し、シート材6が栓座8へ密
着して流路7が遮断される。尚、圧電セラミ7り製の栓
体5の伸長力は略200 kqになる為、シート材6と
栓座8との密冴に確実且つ強固に行える。
Then, when a predetermined electric power (100V, 80m*A) is applied to the stopper 5, the stopper 5 moves slightly It (30 to 5
00 ttm), the sheet material 6 is brought into close contact with the stopper seat 8, and the flow path 7 is blocked. Incidentally, since the elongation force of the plug 5 made of piezoelectric ceramic 7 is approximately 200 kq, the sheet material 6 and the plug seat 8 can be tightly and reliably and firmly attached.

上記実施例に於いては、栓体5を円柱形状としたが、他
の実施例に於いては、第2図に示す如く、栓体5を円板
形状にしても良く、或は他の形状にしても良いことは勿
論である。
In the above embodiment, the plug body 5 has a cylindrical shape, but in other embodiments, the plug body 5 may have a disc shape, as shown in FIG. Of course, it may be of any shape.

(発明の効果) 上述の通り、本発明の制御器は、大きな伸長力を有する
圧電セラミック製の栓体な箱体内に設け、君娶栓体に電
圧を印加して伸長させ、これにより栓体に取付けたシー
ル材と箱体の栓座とを密着させる構成としている為、閉
弁時ンこはシール材と栓座とが確実且つ強固に密着し、
高圧流体を取扱っても流体が漏洩することはない。
(Effects of the Invention) As described above, the controller of the present invention is provided in a box body made of a piezoelectric ceramic plug having a large elongation force, and applies a voltage to the plug body to cause it to expand, thereby causing the plug body to expand. Since the sealing material attached to the box and the stopper seat are in close contact with each other, when the valve is closed, the sealing material and the stopper seat are firmly and firmly attached.
Fluid will not leak even when high-pressure fluid is handled.

又、栓体自身を伸長させて流路を遮断する(R成と1〜
でいる為、栓体が箱体に対して摺動することは1度<、
スピンドルを使用した従来の制御器に比較1−で、装置
の作動用エネルギーの消費が少なくなると共eこ、制御
性が大幅に向にする。
Also, the plug body itself is extended to block the flow path (R formation and 1 to 1).
Because of this, the stopper slides against the box only once.
Compared to conventional controllers using spindles, the energy consumption for operating the device is reduced and the controllability is greatly improved.

更に、本発明の制御器は、部品点数が従来の制御器に比
較して少なくて済み、組立や構造の簡略化を図れると共
に、メンテナンスも簡弔且つ容易になる。
Furthermore, the controller of the present invention requires fewer parts than conventional controllers, which simplifies assembly and structure, and makes maintenance simple and easy.

そのI−1栓体が箱体に対1−て摺動することがないr
)、栓体や箱体から不純物が出ることもなく、本発明の
制御器を半導体製造装置等の高純度ガスを取扱う管路に
使用する場合には極めて好都合である。
The I-1 stopper will not slide against the box.
), impurities do not come out from the stopper or box, and the controller of the present invention is extremely convenient when used in a pipeline handling high-purity gas such as in semiconductor manufacturing equipment.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の第1実施例に係る制御器の縦断面図、
第2図は本発明の第2実施例に係る制御器の縦断面図で
ある。 1は箱体、5は栓体、6はシート材、7は流路。 と 壮 = 妃 侶 憚 葦  、さ  岩 t Hの   ■   )   ■
FIG. 1 is a longitudinal sectional view of a controller according to a first embodiment of the present invention;
FIG. 2 is a longitudinal sectional view of a controller according to a second embodiment of the present invention. 1 is a box body, 5 is a plug body, 6 is a sheet material, and 7 is a flow path. and so = concubine reed, sa rock tH ■ ) ■

Claims (1)

【特許請求の範囲】[Claims] 流体が流通する流路(7)とその途中に形成した栓座(
8)とを有する箱体(1)と;箱体(1)内に支持され
、電圧の印加により栓座(8)側へ伸長する圧電セラミ
ック製の栓体(5)と;栓体(5)に取付けられ、栓体
(5)の伸長時に箱体(1)の栓座(8)に当座するシ
ート材(6)とから構成したことを特徴とする制御器。
A channel (7) through which fluid flows and a stopper (7) formed in the middle of the channel (7)
a box (1) having a piezoelectric ceramic plug (5) that is supported within the box (1) and extends toward the plug seat (8) upon application of a voltage; ) and a sheet material (6) that rests on the stopper seat (8) of the box body (1) when the stopper body (5) is extended.
JP26204985A 1985-11-21 1985-11-21 Controller Pending JPS62124373A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26204985A JPS62124373A (en) 1985-11-21 1985-11-21 Controller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26204985A JPS62124373A (en) 1985-11-21 1985-11-21 Controller

Publications (1)

Publication Number Publication Date
JPS62124373A true JPS62124373A (en) 1987-06-05

Family

ID=17370321

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26204985A Pending JPS62124373A (en) 1985-11-21 1985-11-21 Controller

Country Status (1)

Country Link
JP (1) JPS62124373A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0233978U (en) * 1988-08-27 1990-03-05

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62211176A (en) * 1986-03-12 1987-09-17 Oki Electric Ind Co Ltd Printer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62211176A (en) * 1986-03-12 1987-09-17 Oki Electric Ind Co Ltd Printer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0233978U (en) * 1988-08-27 1990-03-05

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