JPS62124373A - Controller - Google Patents

Abstract

PURPOSE:To eliminate the leakage of fluid, by providing a valve member formed of piezoelectric ceramics in a casing having a valve seat in a fluid passage, and also providing a seat member adapted to abut against the valve seat of the casing upon expansion of the valve member. CONSTITUTION:A casing 1 includes a fluid passage 7 through which a fluid flows, a valve seat 8 formed in the fluid passage 7, and a valve chamber 9. A valve member 5 is formed of piezoelectric ceramics, and is adapted to be expanded to the valve seat 8 upon application of voltage thereto. A seat member 6 is fixed at the lower end of the valve member 5 in such a manner as to be abuttable against and separatable from the valve seat 8. Thus, the seat member is reliably tightly contacted with the valve seat upon closing of the valve, thereby eliminating the leakage of fluid even under high pressure.

Description

Detailed Description of the Invention (Industrial Application Field) The present invention is used in devices and machines that handle fluids, and uses electric power for driving, and when voltage is applied, the flow path is closed. The present invention relates to a controller that shuts off the flow path and opens the flow path when no voltage is applied.

(Prior Art) In general, solenoid valves and diaphragm seal type valves are known as controllers that can open and close automatically. The latter is used, for example, in pipelines handling high-purity gas in semiconductor manufacturing equipment, nuclear power plants, etc.

By moving the spindle using the drive unit, each of the valves is closed by causing the stopper body or diaphragm to rest against the stopper seat, and the spindle is moved in the opposite direction by the elastic force of the spring. By doing so, the stopper and the diaphragm are separated from the stopper seat, and the valve is in an open state.

However, since the driving force of the strain/id valve is small, it is difficult to completely close the valve, and since it uses a spring, it is not suitable for handling corrosive fluids. Further, since the diaphragm seal type valve uses a diaphragm, it cannot be used for high temperature and high pressure fluids, and there are problems such as the diaphragm deteriorating due to short-term IH. Furthermore, since each of the above-mentioned valves is configured to open and close by moving the spindle, it is unavoidable that foreign matter is mixed in due to j-y friction, which can lead to a decrease in the purity of the gas in pipelines that handle high-purity gas. There is a problem with waking up. Moreover, since each valve requires a spring for opening the valve, there are problems in that assembly is complicated, t1η construction is also complicated, and a large amount of operating energy is consumed.

(Problems to be Solved by the Invention) The present invention was devised to solve the problems described in -1-, and its purpose is to be suitable for handling high-purity fluids, high-pressure fluids, etc., and to improve efficiency. It is an object of the present invention to provide a controller which is extremely efficient and whose assembly and structure can be simplified.

(Means for Solving the Problems) The controller of the present invention includes a box body having a flow path through which fluid flows and a stopper formed in the middle thereof; It is characterized by being composed of a plug made of piezoelectric ceramic that extends to the side; and a sheet material that is attached to the plug and rests on the plug seat of the box when the plug is extended.

(Function) In the controller described in 111.1, when no voltage is applied, there is a gap between the stopper seat of the box body and the seal material attached to the stopper body, and the valve is in an open state.

When a predetermined voltage is applied to the piezoelectric ceramic stopper, the stopper extends toward the stopper seat, and the sheet material comes into close contact with the stopper seat, resulting in a closed state.

(Example) Hereinafter, an example of the present invention will be described in detail based on the drawings.

FIG. 1 is a vertical cross-sectional view of a controller according to a first embodiment of the present invention, where ■ is a box, 2 is a support member, 3 is a packing, 4 is a bonnet, 5 is a stopper, and 6 is a sheet material. It is.

The box body 1 is made of ceramic, metal, etc., and includes a channel 7 through which fluid flows, a stopper seat 8 formed in the middle of the channel, a stopper seat 9 formed above the stopper seat 8, etc. It is equipped with A support member 2 that seals the stopper 9 is fitted onto the upper part of the box body 1 via a gasket 3, and the support member 2 is pressed and fixed by a bonnet 4 screwed onto the box body 1. There is.

The plug body 5 is made of a piezoelectric ceramic member and is attached to the box body 1.
supported within. That is, in this embodiment, the stopper 5 has a cylindrical shape, and its outer peripheral surface is housed in a non-contact state with the inner wall of the stopper 9 of the box 1, and its upper end is connected to the support member 2. The lower end faces the stopper seat 8 by an appropriate method. The stopper 5 is formed so as to extend toward the stopper seat 8 when a voltage is applied, and the lower end of the stopper 5 is made of gold made by J. A sheet material 6 is fixed thereto, and a cord 10 for applying voltage is connected to the upper end of the sheet material 6. The length of the stopper 5 is such that a slight gap is formed between the stopper seat 8 and the sheet material 6 when no voltage is applied, and the sheet material 6 is in close contact with the stopper seat 8 when a mixed pressure is applied. It has been selected as follows.

In the controller configured as described above, when no voltage is applied, there is a slight gap between the plug seat 8 and the sheet material 6, and the fluid flows in the flow path 7.

Then, when a predetermined electric power (100V, 80m*A) is applied to the stopper 5, the stopper 5 moves slightly It (30 to 5
00 ttm), the sheet material 6 is brought into close contact with the stopper seat 8, and the flow path 7 is blocked. Incidentally, since the elongation force of the plug 5 made of piezoelectric ceramic 7 is approximately 200 kq, the sheet material 6 and the plug seat 8 can be tightly and reliably and firmly attached.

In the above embodiment, the plug body 5 has a cylindrical shape, but in other embodiments, the plug body 5 may have a disc shape, as shown in FIG. Of course, it may be of any shape.

(Effects of the Invention) As described above, the controller of the present invention is provided in a box body made of a piezoelectric ceramic plug having a large elongation force, and applies a voltage to the plug body to cause it to expand, thereby causing the plug body to expand. Since the sealing material attached to the box and the stopper seat are in close contact with each other, when the valve is closed, the sealing material and the stopper seat are firmly and firmly attached.
Fluid will not leak even when high-pressure fluid is handled.

Also, the plug body itself is extended to block the flow path (R formation and 1 to 1).
Because of this, the stopper slides against the box only once.
Compared to conventional controllers using spindles, the energy consumption for operating the device is reduced and the controllability is greatly improved.

Furthermore, the controller of the present invention requires fewer parts than conventional controllers, which simplifies assembly and structure, and makes maintenance simple and easy.

The I-1 stopper will not slide against the box.
), impurities do not come out from the stopper or box, and the controller of the present invention is extremely convenient when used in a pipeline handling high-purity gas such as in semiconductor manufacturing equipment.

[Brief explanation of drawings]

FIG. 1 is a longitudinal sectional view of a controller according to a first embodiment of the present invention;
FIG. 2 is a longitudinal sectional view of a controller according to a second embodiment of the present invention. 1 is a box body, 5 is a plug body, 6 is a sheet material, and 7 is a flow path. and so = concubine reed, sa rock tH ■ ) ■

Claims (1)

[Claims] A channel (7) through which fluid flows and a stopper (7) formed in the middle of the channel (7)
a box (1) having a piezoelectric ceramic plug (5) that is supported within the box (1) and extends toward the plug seat (8) upon application of a voltage; ) and a sheet material (6) that rests on the stopper seat (8) of the box body (1) when the stopper body (5) is extended.