JPH061110B2 - Controller - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention is used for a device and a device for handling a fluid, which uses electric power for driving and shuts off a flow path when a voltage is applied. , Relates to a controller that opens the flow path when no voltage is applied.

(Prior Art) Generally, as a controller that can automatically open and close, a solenoid valve, a diaphragm seal type valve, etc. are known, and the former is used in combination with an automatic measuring device, etc. to shut off the fluid urgently. The latter is used, for example, in pipelines for handling high-purity gas in semiconductor manufacturing equipment, nuclear power plants, etc.

Then, in each of the valves, when the spindle is moved by the drive unit, the plug and the diaphragm come into contact with the plug seat to close the valve, and the elastic force of the spring moves the spindle in the opposite direction. By doing so, the stopper and the diaphragm are separated from the stopper seat, and the valve is opened.

However, the solenoid valve has a problem that it is difficult to completely close it because the driving force is small. Further, since the diaphragm seal type valve uses the diaphragm, it cannot be used for high temperature and high pressure fluids, and the diaphragm is deteriorated in a short period of time. Further, in each of the valves, since the spindle slides on the box body when the valve is opened and closed to move the stopper body to and from the stopper seat, a large amount of energy for operation is required, resulting in poor efficiency. There is.

(Problems to be Solved by the Invention) The present invention was created in order to solve the above problems, and its purpose is to handle high-pressure fluids and the like, and to have excellent controllability and energy consumption. The purpose is to provide a controller with low operating efficiency.

(Means for Solving Problems) The present invention relates to a box body 1 having a flow path 6 through which a fluid flows and a plug seat 7 formed in the middle of the flow path 6; A plug body 3 which is seated on the stopper seat 7; a piezoelectric ceramic driving body 4 which is horizontally arranged and supported in the box body 1 and extends forward by application of a voltage; A plug pressing member 12 which is vertically arranged integrally with the upper part, and whose both side surfaces are tapered surfaces 11 which expand downward.
Between the one taper surface 11 of the plug pressing member 12 and the front end surface of the driving body 4, and between the other taper surface 11 of the plug pressing member 12 and the inner wall surface of the box 1 respectively. A pair of rollers 13 which are interposed in a posture parallel to each other and restricted in upward movement is a basic configuration of the invention.

(Operation) In the controller, the drive body is in a shortened state when a voltage is not applied, and the plug moves to a direction away from the plug seat due to fluid pressure and is in a valve open state.

Then, when a predetermined voltage is applied to the piezoelectric ceramic drive body, the drive body is slightly expanded in a predetermined direction, and the expansion amount is expanded by the expansion mechanism and transmitted to the plug body. As a result, the stopper moves to the stopper seat side and comes into close contact with the stopper seat, and the valve is closed.

(Example) Hereinafter, the Example of this invention is described in detail based on drawing.

FIG. 1 is a vertical cross-sectional view of a controller according to an embodiment of the present invention, in which 1 is a box, 2 is a lid, 3 is a plug, 4 is a drive, and 5 is an expansion mechanism.

The box body 1 is made of a ceramic material, a metal material, or the like, and is provided with a flow path 6 through which a fluid flows, a stopper seat 7 formed in the middle thereof, and a stopper chamber 8 formed above the stopper seat 7. ing. A lid 2 for sealing the stopper chamber 8 is provided on the top of the box 1.
Are screwed through a packing (not shown).

The stopper 3 has a short, substantially cylindrical shape, and is provided in the stopper chamber 8 so as to be seated on the stopper 7 of the box 1.

The drive body 4 is made of a piezoelectric ceramic member and is supported in the box body 1. That is, in this embodiment, the driving body 4 has a columnar shape, and the outer peripheral surface thereof is the stopper chamber 8 of the box body 1.
It is housed in the inner wall in a non-contact state, and one end thereof is fixed to the box body 1 by a proper method so as to be orthogonal to the axis of the plug body 3. Further, the driving body 4 is adapted to extend in a direction orthogonal to the axis of the plug body 3 when a voltage is applied. Further, a metal coating 9 is applied to one end of the driving body 4, and a cord 10 for applying a voltage is connected to the other end.

Between the plug body 3 and the drive body 4, when the drive body 4 is extended, the amount of extension is expanded and transmitted to the plug body 3, and the stroke of the plug body 3 is increased to increase the stroke of the plug body. An enlarging mechanism 5 for seating on 7 is provided. That is, in the present embodiment, the enlargement mechanism 5 is fixed to the upper surface of the stopper body 3, and the stopper body pressing member 12 having the tapered surfaces 11 formed on both sides to sequentially expand downward.
And one taper surface 11 of the plug pressing member 12 and the driving body 4
Also, the other tapered surface 11 of the plug pressing member 12 and the box 1
And a pair of rollers 13 interposed in line contact with each other. That is, as shown in FIG. 1, the rollers 13 are rotatably interposed in parallel in a horizontal posture and in a state in which upward movement is restricted by the back surface side of the lid 2. Therefore, when the driving body 4 extends and the roller 13 is pressed, the force is applied to the tapered surface 1 of the plug pressing member 12.
1 acts in the axial direction of the plug body 3, and pushes the plug body pressing member 12 downward, that is, toward the plug seat 7 side, so that the plug body 3 is seated on the plug seat 7. At this time, the moving amount of the plug pressing member 12 is increased by the taper surface 11 of the pressing moving amount of the roller 13, that is, the extending amount of the driving body 4.

Thus, in the controller having the above-described configuration, the drive body 4 is in a shortened state when no voltage is applied, and the plug body 3 is lifted by the fluid pressure in the flow path 6 and is separated from the plug seat 7 to open and close. (See FIG. 1).

Then, when a predetermined power (100 v, 80 mmA) is applied to the driving body 4, the driving body 4 expands by a certain amount (30 to 500 μm) and presses the roller 13 toward the plug pressing member 12 side. Then, the stopper pressing member 12 descends due to the pressing action of the tapered surface 11 and the roller 13, and the stopper 3 comes into close contact with the stopper seat 7 to be in the valve closed state (see FIG. 2).

The moving amount of the plug pressing member 12 is considerably increased by the tapered surface 11 than the pressing moving amount of the roller 13, that is, the extending amount of the driving body 4. As a result, the stroke of the plug body 3 becomes long, the gap between the plug body 3 and the plug seat 7 can be increased when the valve is opened, and the passage of fluid is not hindered.

Further, since the controller has the enlargement mechanism 5 interposed between the plug body 3 and the driving body 4, the pressing force between the plug body 3 and the plug seat 7 is reduced by this, but it is made of piezoelectric ceramic. Since the extension force of the driving body 4 is approximately 200 kg, even if the pressing force is reduced by the temporary expansion mechanism 5, sufficient pressing force is exerted when the stopper body 3 and the stopper seat 7 are in close contact with each other, and the sealing performance is improved. There will be no trouble.

In the above embodiment, the driving body 4 has a cylindrical shape,
The shape is not limited to that of the above embodiment.

In the above embodiment, the plug pressing member 12 is formed in a plate shape and is fixed above the plug 3.
The plug body 3 and the plug body pressing member 12 may be integrally formed.
Further, the plug pressing member 12 may have a conical columnar shape, and tapered surfaces may be formed on both side surfaces thereof.

(Effects of the Invention) As described above, the controller of the present invention is configured to cause the plug body to be seated on the stopper seat by the large expansion force of the piezoelectric ceramic drive body and the expansion mechanism that expands the expansion amount of the drive body. Therefore, when the valve is closed, the stopper and the stopper seat firmly and firmly adhere to each other,
Even if you handle high-pressure fluid, the fluid will not leak. or,
In the present invention, since the enlargement mechanism 5 is composed of the plug pressing member 12 and the pair of rollers 13, the structure thereof is extremely simplified, and the occurrence of malfunctions is greatly reduced. Further, since the driving body does not slide with respect to the box body, compared with the conventional controller using the spindle, the operating energy is reduced and the controllability is greatly improved.

[Brief description of drawings]

FIG. 1 is a vertical sectional view of a valve open state of a controller according to an embodiment of the present invention, and FIG. 2 is a vertical sectional view of the same valve closed state. 1 is a box, 3 is a plug, 4 is a driver, 5 is an expansion mechanism, 6 is a flow path, and 7 is a plug seat.

Claims (1)

[Claims] 1. A box body (1) having a flow path (6) through which a fluid flows and a plug seat (7) formed in the middle of the box body; A stopper body (3) which is seated on the stopper seat (7);
A piezoelectric ceramic driving body (4) which is horizontally arranged and supported in the box body (1) and extends forward by the application of a voltage; vertically above the plug body (3) integrally therewith. A plug pressing member (12) having a tapered surface (11) whose both side surfaces are enlarged downward; and one taper surface (11) of the plug pressing member (12) and the drive. Move in parallel and upward in a horizontal position between the front end surface of the body (4) and between the other tapered surface (11) of the plug pressing member (12) and the inner wall surface of the box (1). A controller comprising a pair of rollers (13) interposed in a regulated state.