JPS62123234U - - Google Patents

Info

Publication number
JPS62123234U
JPS62123234U JP1127086U JP1127086U JPS62123234U JP S62123234 U JPS62123234 U JP S62123234U JP 1127086 U JP1127086 U JP 1127086U JP 1127086 U JP1127086 U JP 1127086U JP S62123234 U JPS62123234 U JP S62123234U
Authority
JP
Japan
Prior art keywords
main processing
waste gas
processing
capacity
processing chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1127086U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0317935Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986011270U priority Critical patent/JPH0317935Y2/ja
Publication of JPS62123234U publication Critical patent/JPS62123234U/ja
Application granted granted Critical
Publication of JPH0317935Y2 publication Critical patent/JPH0317935Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)
JP1986011270U 1986-01-28 1986-01-28 Expired JPH0317935Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986011270U JPH0317935Y2 (enExample) 1986-01-28 1986-01-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986011270U JPH0317935Y2 (enExample) 1986-01-28 1986-01-28

Publications (2)

Publication Number Publication Date
JPS62123234U true JPS62123234U (enExample) 1987-08-05
JPH0317935Y2 JPH0317935Y2 (enExample) 1991-04-16

Family

ID=30798330

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986011270U Expired JPH0317935Y2 (enExample) 1986-01-28 1986-01-28

Country Status (1)

Country Link
JP (1) JPH0317935Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010158643A (ja) * 2009-01-09 2010-07-22 Ebara Corp 予備処理槽を備えた排ガス処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59179414U (ja) * 1983-05-17 1984-11-30 株式会社東芝 ガス絶縁機器におけるｓｆ６液化回収装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59179414U (ja) * 1983-05-17 1984-11-30 株式会社東芝 ガス絶縁機器におけるｓｆ６液化回収装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010158643A (ja) * 2009-01-09 2010-07-22 Ebara Corp 予備処理槽を備えた排ガス処理装置

Also Published As

Publication number Publication date
JPH0317935Y2 (enExample) 1991-04-16

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