JPS62122336U - - Google Patents
Info
- Publication number
- JPS62122336U JPS62122336U JP19882286U JP19882286U JPS62122336U JP S62122336 U JPS62122336 U JP S62122336U JP 19882286 U JP19882286 U JP 19882286U JP 19882286 U JP19882286 U JP 19882286U JP S62122336 U JPS62122336 U JP S62122336U
- Authority
- JP
- Japan
- Prior art keywords
- shutter plate
- filter
- exposure
- wafer alignment
- resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19882286U JPS62122336U (enExample) | 1986-12-26 | 1986-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19882286U JPS62122336U (enExample) | 1986-12-26 | 1986-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62122336U true JPS62122336U (enExample) | 1987-08-03 |
Family
ID=31159869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19882286U Pending JPS62122336U (enExample) | 1986-12-26 | 1986-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62122336U (enExample) |
-
1986
- 1986-12-26 JP JP19882286U patent/JPS62122336U/ja active Pending