JPS62121382A - High counting rate measurement use semiconductor type fluorescent x-ray counter - Google Patents

Abstract

PURPOSE:To execute quickly a high counting rate measurement by using plural pieces of X-ray detectors. CONSTITUTION:In accordance with each of plural semiconductor type X-ray detectors 1113, amplifiers 21-23, 31-33, A/D converters 41-43, and multi-channel memories 51-53 are provided, and also one data processor 6 is prepared so as to be common to each detector 11-13, so that all of them are operated as one counting device. Accordingly, comparing with the case by a single detec tor, a fluorescent X-ray counting rate of (n) times is obtained, in case (n) pieces of detectors are used, therefore, the measuring time is shortened to 1/n, and also a high counting rate measurement can be executed.

Description

[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to an X-ray counting device, and in particular to a semiconductor-type fluorescent device for high count rate measurement suitable for fluorescent X-ray counting using synchrotron radiation as an excitation source. This invention relates to an X-ray counting device.

[Background of the invention]

As a conventional semiconductor type X-ray counting device.

X-rayBnerg3' by ROLF WOLDSETH
Spect-rometer7) (KEVEX C
arp, June 1973), Chapter 2 (
As shown in chapter 2), from the essential characteristics of semiconductor X-ray detectors, the
When the counting rate exceeds aps (count 7 seconds),
The ratio of the number of output counts to the number of input counts suddenly becomes 1.
It is becoming smaller.

In order to correct this characteristic, the operating times of the amplifier section and A/D converter have been adjusted so far. However, even if such a method is used, the correction is limited to an input count rate of 10,000 cps at most, and it cannot be used as a fluorescence X-ray counter using a powerful excitation X-ray source such as synchrotron radiation. To use the incident
It is necessary to suppress the strength of the line, and there are problems such as a long measurement time.

[Purpose of the invention]

SUMMARY OF THE INVENTION An object of the present invention is to provide a semiconductor type fluorescence X-ray counting device for high count rate measurement, which enables quick high count rate measurement even when using a powerful excitation X1fs source such as synchrotron radiation. be.

[Summary of the invention]

For this purpose, the semiconductor type fluorescence Xa counting device for high count rate measurement according to the present invention is provided with an amplifier section, an A/D converter, and a multi-channel memory corresponding to each of the plurality of semiconductor type X-ray detectors. , one data processing device is provided in common for each detector, and these devices collectively operate as one counting device. When multiple detectors are installed at the tip of a single rod-shaped thermal conductor and when data from multiple multi-channel memories are processed by a single data processing device, the detector This enables high counting rate measurement in proportion to the number of parallel installations.

[Embodiments of the invention]

Hereinafter, one embodiment of the present invention will be explained. Figure 1 shows a three-dimensional structure from the semiconductor detector itself to the multi-channel memory.
This figure shows the general configuration of a semiconductor-type fluorescent X-ray counting device for high count rate measurement configured as a heavy parallel counting system.

As shown in the figure, for each of the three semiconductor type detectors 11 to 13, one semiconductor type detector 1. ~1. Preamplifiers 2, to 25, preamplifiers 2. An amplifier to make the output signal from ~25 sufficiently large 3. ~35,
Amplifier 3. Converters 41 to 45 and A/D converters 4. to 45 convert output signals from 4. to 33 into digital signals. ~4
Multi-channel memories 5, to 53 are provided for storing output data of 5. The data processing device 6 includes a multi-channel memory 5. This is to obtain the necessary measurement value data using the data of ~53,
Various processing results are displayed on the display device 7. Note that 8 is a high-voltage power supply for operating the detector, and 9 is a refrigerant supply device for maintaining the semiconductor type detector at a low temperature.

The measurement data stored in the multi-channel memory in this way is transferred to a data processing device, corrected in a prescribed manner, and then processed within the data processing device. Specifically, the arithmetic processing is addition processing.

Since the semiconductor type Xi detectors 11 to 15 output a voltage pulse proportional to the energy of the incident X-ray photon, the A/D converter 4. amplifies this pulse voltage to a predetermined value. ~45
5. converts these digital signals into digital signals and stores them in a multi-channel memory 5. -5 as an address signal, and the memory contents corresponding to the address signal are incremented by +1 each time the address signal is input. As a result, the spectrum is measured using the address as the energy of the X-ray photon and the content of the address as the count number of the X-ray photon. Therefore, later multi-channel memory 5.
If all the contents corresponding to the same address of 53 to 53 are added, three semiconductor X-ray detectors 1. This means that the spectra of all the X-rays incident on the rays 1 to 15 can be obtained.

FIG. 2 shows the relative arrangement of the six X-ray detectors mentioned above and the arrangement of the entire X-ray detector with respect to the radiation source. In addition, FIG. 2(a).

In (b), the conventional X-ray detector is also shown as 1o, but this is configured as a single Xi detector.

First, FIG. 2(a) shows the arrangement relationship for a point ray source. An X-ray detection unit 1 is located at a distance 1 from the point ray source 11.
0 is arranged, the X-ray detector according to the present invention 1.
.about.13 is placed at the 1 position. As a result, the number of counts by the X-ray detector 1o and the number of
Line detector 1. .about.15 is the same as the sum of the counts.

Next, referring to FIG. 2(b), it shows the case of parallel X-ray fluxes. In this case, multiple
Even if a line detector is used, the number of counts per detector is
(the number counted by the ray detection unit 1o), it is necessary to suppress the intensity of incident X-rays. Therefore, cases where high count rate measurement is possible by using multiple X-ray detectors in parallel are limited to divergent X-ray systems such as fluorescent X-ray counting where the X-ray source is a point source. It will be done.

In this way, according to this example, by using six X-ray detectors, it is possible to handle X-ray flux with a count rate six times higher than before with the same operation as a single X-ray detector. This means that the measurement time can be reduced to 1/3.

〔Effect of the invention〕

As explained above, according to the present invention, when using n detectors, n times the fluorescence X-ray count rate can be obtained compared to the conventional case using a single detector, so the measurement time is i/ Fluorescence X that can be shortened to n and uses synchrotron radiation as an excitation source
This has the advantage that measurements using a semiconductor detector can be performed at a high counting rate.

[Brief explanation of drawings]

FIG. 1 is a diagram showing a schematic configuration of an example of the apparatus according to the present invention, and FIGS. 2(a) and 2(b) are diagrams showing the relative arrangement of X-ray detectors according to the present invention and various lines. FIG. 3 is a diagram for explaining the arrangement relationship of the entire X-ray detector with respect to the source. 1, ~15...Semiconductor type (X-ray) detector 21~
25...Preamplifier 3, ~35...Amplifier 4, ~45...A/D converter 5, ~5. ...Multi-channel memory 6.
...Data processing device 5JL

Claims (1)

[Claims] A plurality of semiconductor X-ray detectors mounted on the tip of a rod-shaped heat conductor that can be cooled by a refrigerant, an amplifying section for amplifying the output signal of each of the detectors, and an analog output signal of each of the amplifying sections. an A/D converter for converting the digital signal into a digital signal; a multi-channel memory for storing the digital output signal of each converter; and a multi-channel memory for storing the digital output signal of each converter, and processing the data stored in each memory to generate necessary data. 1. A semiconductor type fluorescent X-ray counting device for high count rate measurement, characterized by a configuration consisting of a single data processing device for obtaining data.