JPS62120365U - - Google Patents

Info

Publication number

JPS62120365U

JPS62120365U JP793486U JP793486U JPS62120365U JP S62120365 U JPS62120365 U JP S62120365U JP 793486 U JP793486 U JP 793486U JP 793486 U JP793486 U JP 793486U JP S62120365 U JPS62120365 U JP S62120365U

Authority

JP

Japan

Prior art keywords

semiconductor substrate

guard ring

conductivity type

recess

shot key

Prior art date

1986-01-22

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 5
• 230000004888 barrier function Effects 0.000 claims description 4
• 239000004065 semiconductor Substances 0.000 claims 4
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1
• 229910052814 silicon oxide Inorganic materials 0.000 description 1