JPS62120344U - - Google Patents

Info

Publication number
JPS62120344U
JPS62120344U JP802586U JP802586U JPS62120344U JP S62120344 U JPS62120344 U JP S62120344U JP 802586 U JP802586 U JP 802586U JP 802586 U JP802586 U JP 802586U JP S62120344 U JPS62120344 U JP S62120344U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
centrifugal
rotor
nozzle
centrifugal dewatering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP802586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP802586U priority Critical patent/JPS62120344U/ja
Publication of JPS62120344U publication Critical patent/JPS62120344U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP802586U 1986-01-21 1986-01-21 Pending JPS62120344U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP802586U JPS62120344U (enrdf_load_stackoverflow) 1986-01-21 1986-01-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP802586U JPS62120344U (enrdf_load_stackoverflow) 1986-01-21 1986-01-21

Publications (1)

Publication Number Publication Date
JPS62120344U true JPS62120344U (enrdf_load_stackoverflow) 1987-07-30

Family

ID=30792028

Family Applications (1)

Application Number Title Priority Date Filing Date
JP802586U Pending JPS62120344U (enrdf_load_stackoverflow) 1986-01-21 1986-01-21

Country Status (1)

Country Link
JP (1) JPS62120344U (enrdf_load_stackoverflow)

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