JPS62120344U - - Google Patents
Info
- Publication number
- JPS62120344U JPS62120344U JP802586U JP802586U JPS62120344U JP S62120344 U JPS62120344 U JP S62120344U JP 802586 U JP802586 U JP 802586U JP 802586 U JP802586 U JP 802586U JP S62120344 U JPS62120344 U JP S62120344U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- centrifugal
- rotor
- nozzle
- centrifugal dewatering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 230000018044 dehydration Effects 0.000 claims 1
- 238000006297 dehydration reaction Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP802586U JPS62120344U (enrdf_load_stackoverflow) | 1986-01-21 | 1986-01-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP802586U JPS62120344U (enrdf_load_stackoverflow) | 1986-01-21 | 1986-01-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62120344U true JPS62120344U (enrdf_load_stackoverflow) | 1987-07-30 |
Family
ID=30792028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP802586U Pending JPS62120344U (enrdf_load_stackoverflow) | 1986-01-21 | 1986-01-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62120344U (enrdf_load_stackoverflow) |
-
1986
- 1986-01-21 JP JP802586U patent/JPS62120344U/ja active Pending
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