JPS62120339U - - Google Patents
Info
- Publication number
- JPS62120339U JPS62120339U JP703786U JP703786U JPS62120339U JP S62120339 U JPS62120339 U JP S62120339U JP 703786 U JP703786 U JP 703786U JP 703786 U JP703786 U JP 703786U JP S62120339 U JPS62120339 U JP S62120339U
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- semiconductor wafer
- plate
- diffusion
- serves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- 238000009792 diffusion process Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000012768 molten material Substances 0.000 claims 2
- 239000012535 impurity Substances 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP703786U JPS62120339U (en:Method) | 1986-01-21 | 1986-01-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP703786U JPS62120339U (en:Method) | 1986-01-21 | 1986-01-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62120339U true JPS62120339U (en:Method) | 1987-07-30 |
Family
ID=30790118
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP703786U Pending JPS62120339U (en:Method) | 1986-01-21 | 1986-01-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62120339U (en:Method) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57167625A (en) * | 1980-11-24 | 1982-10-15 | Ee Esu Kiyuu Bootsu Inc | Quartz boat for machining semiconductor wafer |
-
1986
- 1986-01-21 JP JP703786U patent/JPS62120339U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57167625A (en) * | 1980-11-24 | 1982-10-15 | Ee Esu Kiyuu Bootsu Inc | Quartz boat for machining semiconductor wafer |