JPS62120339U - - Google Patents

Info

Publication number
JPS62120339U
JPS62120339U JP703786U JP703786U JPS62120339U JP S62120339 U JPS62120339 U JP S62120339U JP 703786 U JP703786 U JP 703786U JP 703786 U JP703786 U JP 703786U JP S62120339 U JPS62120339 U JP S62120339U
Authority
JP
Japan
Prior art keywords
quartz
semiconductor wafer
plate
diffusion
serves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP703786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP703786U priority Critical patent/JPS62120339U/ja
Publication of JPS62120339U publication Critical patent/JPS62120339U/ja
Pending legal-status Critical Current

Links

JP703786U 1986-01-21 1986-01-21 Pending JPS62120339U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP703786U JPS62120339U (enrdf_load_stackoverflow) 1986-01-21 1986-01-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP703786U JPS62120339U (enrdf_load_stackoverflow) 1986-01-21 1986-01-21

Publications (1)

Publication Number Publication Date
JPS62120339U true JPS62120339U (enrdf_load_stackoverflow) 1987-07-30

Family

ID=30790118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP703786U Pending JPS62120339U (enrdf_load_stackoverflow) 1986-01-21 1986-01-21

Country Status (1)

Country Link
JP (1) JPS62120339U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57167625A (en) * 1980-11-24 1982-10-15 Ee Esu Kiyuu Bootsu Inc Quartz boat for machining semiconductor wafer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57167625A (en) * 1980-11-24 1982-10-15 Ee Esu Kiyuu Bootsu Inc Quartz boat for machining semiconductor wafer

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