JPS62119130A - Production of sensing loop of optical gyro - Google Patents

Production of sensing loop of optical gyro

Info

Publication number
JPS62119130A
JPS62119130A JP25817785A JP25817785A JPS62119130A JP S62119130 A JPS62119130 A JP S62119130A JP 25817785 A JP25817785 A JP 25817785A JP 25817785 A JP25817785 A JP 25817785A JP S62119130 A JPS62119130 A JP S62119130A
Authority
JP
Japan
Prior art keywords
manufacturing
sensing loop
optical gyro
porous silica
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP25817785A
Other languages
Japanese (ja)
Inventor
Motoyuki Toki
元幸 土岐
Sadao Kanbe
貞男 神戸
Tetsuhiko Takeuchi
哲彦 竹内
Satoru Miyashita
悟 宮下
Hirohito Kitabayashi
北林　宏仁
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP25817785A priority Critical patent/JPS62119130A/en
Publication of JPS62119130A publication Critical patent/JPS62119130A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/58—Turn-sensitive devices without moving masses
    • G01C19/64—Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams
    • G01C19/72—Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams with counter-rotating light beams in a passive ring, e.g. fibre laser gyrometers
    • G01C19/721—Details
    • G01C19/722—Details of the mechanical construction
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/12—Other methods of shaping glass by liquid-phase reaction processes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0095—Solution impregnating; Solution doping; Molecular stuffing, e.g. of porous glass
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/44—Mechanical structures for providing tensile strength and external protection for fibres, e.g. optical transmission cables
    • G02B6/4439—Auxiliary devices
    • G02B6/4457—Bobbins; Reels

Abstract

PURPOSE:To improve the mass productivity by forming a single-mode light guide on the outer surface of high purity porous silica having the shape of a cylindrical tube or a column by the diffusion of an alkoxide. CONSTITUTION:A cylindrical body 1 of high purity porous silica having the shape of a cylindrical tube or a column is produced. A spiral mask 2 for a single-mode light guide is formed on the outer surface of the cylindrical body 1. The alkoxide of an element for changing the refractive index of silica or a soln. of the alkoxide is diffused in a porous body through the mask 2. The mask 2 is then stripped and the cylindrical body 1 is made dense by sintering.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、光ジャイロに関し、さらに詳しくはセンシン
グループを石英基板上に一体に形成した。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to an optical gyro, and more specifically, a sensing loop is integrally formed on a quartz substrate.

一体化したコイル状の単一モード光導波路の製造方法に
関する。The present invention relates to a method of manufacturing an integrated coiled single mode optical waveguide.

〔発明の（既要〕[Invention (already required)]

本発明は光ジャイロのセンシングループの製造方法にお
いて、円筒あるいは円柱状のシリカ多孔質体の外側面に
シングルモード導波路のマスクを形成し、マスクの上か
ら屈折率を変える元素のアルコキシドあるいはその溶液
をシリカ多孔質体中に拡散させ、拡散後のシリカ多孔質
体を焼結することにより、円筒あるいは円柱状の石英ガ
ラス基板上に単一モード先導波路を一体で形成し、安価
で小型の光ジャイロのセンシングループの製造方法を提
供したものである。The present invention is a method for manufacturing a sensing loop for an optical gyro, in which a single mode waveguide mask is formed on the outer surface of a cylindrical or cylindrical porous silica body, and an alkoxide of an element or a solution thereof that changes the refractive index is applied from above the mask. By diffusing into a porous silica material and sintering the porous silica material after diffusion, a single mode guided waveguide can be integrally formed on a cylindrical or cylindrical quartz glass substrate. This provides a method for manufacturing a gyro sensing loop.

〔従来の技術〕[Conventional technology]

従来の光ジャイロのセンシングループの製造方法は、日
経メカニカル６．３．Ｐ７５　（１９８５）で保型（東
大工学部）が記載のように、低損失・長尺の単一モード
光ファイバを比較的小さな半径で多数回巻いてセンシン
グループとしたものである。The conventional method for manufacturing the sensing loop of an optical gyro is described in Nikkei Mechanical 6.3. As described by Hosei (Faculty of Engineering, University of Tokyo) in P75 (1985), a sensing loop is made by winding a low-loss, long single-mode optical fiber many times at a relatively small radius.

〔発明が解決しようとする問題点及び目的〕しかし、前
述の従来技術では、たいへん高価で大型となるため、例
えばロボットや自動車へ応用しようとする場合にはそれ
が原因で応用できなくなるという問題点を有する。[Problems and objectives to be solved by the invention] However, the above-mentioned conventional technology is very expensive and large, which makes it impossible to apply it to robots or cars, for example. has.

そこで、本発明はこのような問題点を解決するもので、
その目的とするところは、小型で安価で、また量産性の
ある光ジャイロのセンシングループの製造方法を提供す
るところにある。Therefore, the present invention aims to solve these problems.
The purpose is to provide a method for manufacturing an optical gyro sensing loop that is small, inexpensive, and mass-producible.

〔問題点を解決するための手段〕[Means for solving problems]

本発明の光ジャイロのセンシングループの製造方法は、
以下の工程により製造することを特徴とする。The method for manufacturing an optical gyro sensing loop of the present invention includes:
It is characterized by being manufactured by the following steps.

ａ）窩純度の多孔質シリカ円筒管あるいは円柱体の製造
の工程、 ｂ）上記多孔質シリカ円筒管あるいは円柱体の外側面に
シングルモード導波路のらせん状のマスクを形成する工
程、 Ｃ）上記マスクの上から屈折率を変える元素のアルコキ
シドあるいは、その溶液を多孔質体中に拡散させる工程
、 ｄ）マスクをはがす工程、 ｅ）拡散後の多孔質円筒管あるいは円柱体を焼結し緻密
化する工程、 本発明で使用する多孔質シリカ円筒管あるいは円柱体は
、アルキルシリケートあるいは微粉末シリカを原料とす
るゾル−ゲル法により得られるドライゲルあるいは、ド
ライゲルを熱処理し、強度を強くした多孔質のゲル（以
後焼結ゲルと記す）が適当である。また、四塩化シリコ
ンを原料とし、火炎加水分解あるいはＣＶＤ法で得、ら
れるシリカ多孔質体でも良い。量産性１作業性、コスト
を考えると好ましくはゾル−ゲル法によるドライゲルあ
るいは焼結ゲルが良い。a) a step of manufacturing a porous silica cylindrical tube or cylindrical body with a cavity purity; b) a step of forming a helical mask of a single mode waveguide on the outer surface of the porous silica cylindrical tube or cylindrical body; C) a step of the above. Step of diffusing an alkoxide of an element that changes the refractive index or its solution into the porous body from above the mask, d) Step of peeling off the mask, e) Sintering and densification of the porous cylindrical tube or cylinder after diffusion. The porous silica cylindrical tube or cylindrical body used in the present invention is a dry gel obtained by a sol-gel method using alkyl silicate or finely powdered silica as a raw material, or a porous silica made by heat-treating the dry gel to increase its strength. Gel (hereinafter referred to as sintered gel) is suitable. Alternatively, it may be a porous silica material obtained by flame hydrolysis or CVD using silicon tetrachloride as a raw material. In terms of mass production, workability, and cost, dry gel or sintered gel produced by the sol-gel method is preferable.

ゾル−ゲル法には下記の４製法が有る。The sol-gel method has the following four manufacturing methods.

（１１アルキルシリケートの加水分解によるもの。(Due to hydrolysis of 11-alkyl silicate.

（２）微粉末シリカと水との混合によるもの。(2) By mixing finely powdered silica and water.

（３）アルキルシリケートの加水分解ゾルと微粉末シリ
カを混合後に、ＰＨを３〜６に調整するもの。(3) After mixing the hydrolyzed sol of alkyl silicate and finely powdered silica, the pH is adjusted to 3 to 6.

（４）アルキルシリケートの塩基圧加水分解ゾルとアル
キルシリケートの酸性加水分解ゾルを混合しＰＨを３〜
６に調整するもの。(4) Mix the basic pressure hydrolysis sol of alkyl silicate and the acidic hydrolysis sol of alkyl silicate and adjust the pH to 3~
What to adjust to 6.

上記４製造法のうち、（１）と（２）は大きなバルク状
石英ガラスが得られにくく実用的ではない。しかし、（
３）と（４）は大きなバルクが容易に得られ、本発明の
多孔質シリカ円筒管あるいは円柱体の製法としては好適
である。Among the above four manufacturing methods, methods (1) and (2) are not practical as it is difficult to obtain a large bulk quartz glass. but,(
Methods 3) and (4) are suitable for producing the porous silica cylindrical tube or cylindrical body of the present invention because large bulks can be easily obtained.

一方、円筒管あるいは円柱体のシリカ多孔質体の外側面
に単一モード導波路のパターンニングしたマスクを形成
した後、屈折率を高める元素のアルコキシドを拡散させ
、マスクを除く、拡散層の外周面は空気に露出している
のでクラフト部を形成する必要が有るようならば、ゾル
−ゲル法のゾル溶液にデイツピングすればシリカ膜を形
成でき、クラッド部とすることができる。On the other hand, after forming a patterned mask of a single mode waveguide on the outer surface of a cylindrical tube or a cylindrical porous silica body, an alkoxide of an element that increases the refractive index is diffused, and the outer periphery of the diffusion layer excluding the mask is formed. Since the surface is exposed to the air, if it is necessary to form a cladding part, a silica film can be formed by dipping it in a sol solution of the sol-gel method, and it can be used as a cladding part.

また、上記によって得られる拡散後のシリカ多孔質体は
焼結することにより透明な、単一モード導波路がリング
状に形成された、円筒状あるいは円柱状の石英ガラスが
得られる。ところで、焼結時に、塩素ガス処理による脱
水酸基処理、塩素ガスによる脱塩素処理、ヘリウムガス
中での緻密化を行うと、低損失の単一モード導波路とす
ることができる。Furthermore, by sintering the diffused silica porous body obtained as described above, a transparent cylindrical or columnar quartz glass in which a single mode waveguide is formed in a ring shape is obtained. Incidentally, by performing dehydroxylation treatment using chlorine gas treatment, dechlorination treatment using chlorine gas, and densification in helium gas during sintering, a single mode waveguide with low loss can be obtained.

〔作用〕[Effect]

本発明の上記の構成によれば、円筒状あるいは円柱状の
外側面に低損失な単一モード導波路を一体で形成でき、
小型化や、低価格、量産性に優れた光ジャイロのセンシ
ングループの製造方法を提供できたものである。According to the above configuration of the present invention, a low-loss single mode waveguide can be integrally formed on the outer surface of a cylindrical or columnar shape,
The present invention provides a method for manufacturing an optical gyro sensing loop that is compact, low-cost, and easy to mass-produce.

〔実施例〕〔Example〕

実施例１゜ 精製した市販のケイ酸エチル２０８０ｇ　（１０モル）
に０．０２規定の塩酸１８００ｍ６を加え激しく攪拌し
加水分解した。このゾルに微粉末シリカ（Ａｅｒｏｓｉ
ｌＯＸ５０：アエロジル社の表面積５０ｆｆｌ／ｇのも
のの部品名）を７３２ｇ（１２，２モル）攪拌下加え、
超音波や遠心分離により均一なゾルとした。このゾルに
０．１規定のアンモニア水を滴下しＰＨを４．０に調整
した。Example 1 2080 g (10 mol) of purified commercially available ethyl silicate
1800 m6 of 0.02N hydrochloric acid was added to the mixture, and the mixture was vigorously stirred for hydrolysis. Finely powdered silica (Aerosi) is added to this sol.
lOX50: 732 g (12.2 mol) of Aerosil's product with a surface area of 50 ffl/g was added under stirring,
A uniform sol was made using ultrasound and centrifugation. 0.1 N ammonia water was added dropwise to this sol to adjust the pH to 4.0.

このゾルを円筒状容器（内径２００ｍ、長さ２００ｍ）
に１．２Ｉｌを加え、その軸の回りに回転しながらゲル
化させ管状のゲル（外径２００ｍ、内径１８０ｍｍ、長
さ２０００ｍｍ）が得られた。これを適当な穴あきの容
器に入れ、６０℃で乾燥させ、ドライゲル（外径１５（
１ｍ、内径１３５ｍ、長さ１５０ｍｍ）とし、１０００
℃まで昇温し熱処理して強固な焼結ゲルとした。This sol is poured into a cylindrical container (inner diameter 200m, length 200m).
1.2Il was added to the gel, and the mixture was gelled while rotating around its axis to obtain a tubular gel (outer diameter 200 m, inner diameter 180 mm, length 2000 mm). Place this in a suitable perforated container, dry at 60°C, and dry gel (outer diameter 15 (
1m, inner diameter 135m, length 150mm), 1000
It was heated to ℃ and heat treated to form a strong sintered gel.

円筒状の焼結ゲルの側面に、２００μｍピンチで５μｍ
の溝を付けたらせん状のマスクを、電子ビーム法でレジ
ストで形成した。これをゲルマニウムエトキシドのエタ
ノール溶液（１２，５％）に浸漬し拡散させ、２０μｍ
の拡散層としたｅｖｔいて、エタノール中に再度浸し、
拡散層中のゲルマニウムエトキシドをアンスタッフイン
ゲル約１０μｍのクラフト層をもうけた。次に室温で一
夜、６０°Ｃで３日間乾燥し、９００℃〜１０００℃の
間で塩素ガスを流し脱水酸基処理をし、１１００℃〜１
１５０℃の間で酸素ガスを流し脱塩素処理しＨｅ中で１
５００℃まで昇温し透明化した。さらに光学的均質度を
上げるため１８００度で処理した。以上により、約１０
μｍの径の亀−モード４波路を側面にら線状に５００周
巻いた状態である管状の石英ガラス（外径１００１ｍ、
内径９０龍。5μm with a 200μm pinch on the side of the cylindrical sintered gel
A spiral mask with grooves was formed using resist using an electron beam method. This was immersed in an ethanol solution (12.5%) of germanium ethoxide and diffused to a thickness of 20 μm.
evt as a diffusion layer, immerse it in ethanol again,
The germanium ethoxide in the diffusion layer was unstuffed to form a craft layer with a thickness of about 10 μm. Next, it was dried at room temperature overnight and at 60°C for 3 days, then chlorine gas was passed between 900°C and 1000°C for dehydration treatment, and 1100°C and 100°C
Dechlorination was performed by flowing oxygen gas at 150°C, and 1
The temperature was raised to 500°C and it became transparent. Furthermore, in order to increase optical homogeneity, processing was performed at 1800 degrees. As a result of the above, approximately 10
A tubular quartz glass (outer diameter 1001 m, outer diameter 1001 m,
Inner diameter 90 dragon.

長さ１００１００Ｏが得られた。これは、１５７ｍの単
一モードファイバをループ半径５ｃｆｆｌで巻いた光フ
アイバジャイロのセンシングループと同等の性能である
が、本発明の方が一体化しており、小型化でき量産に優
れている。A length of 100100O was obtained. This is equivalent in performance to the sensing loop of an optical fiber gyro made by winding a 157 m single mode fiber with a loop radius of 5 cffl, but the present invention is more integrated and is more compact and suitable for mass production.

実施例２゜ ｉｆｆ　Ｗした市販のケイ酸エチル４，４１にエタノー
ル６．７１．水１．５１　アンモニア水０．１ａを加え
攪拌し一夜放置した後、エバポレーターで濃縮し２．５
ｊ！にした。これに塩酸を滴下しＰＨを±４．０に調整
した。Example 2 4.41% of commercially available ethyl silicate was mixed with 6.71% of ethanol. Water 1.51 Add 0.1a of ammonia water, stir, leave overnight, and concentrate with an evaporator to 2.5
j! I made it. Hydrochloric acid was added dropwise to this to adjust the pH to ±4.0.

（このゾルをＡとする） また精製した市販のケイ酸エチル１．９βに０゜０２規
定の塩酸０．６１を加え加水分解した。(This sol is referred to as A) Further, 0.61% of 0.02N hydrochloric acid was added to purified commercially available ethyl silicate 1.9β for hydrolysis.

（このゾルをＢとする） 上記ＡゾルとＢゾルを混合し攪拌してからアンモニア水
を滴下しＰＨを４．５にした。このゾル１．２２を円筒
状容器（内径２００１ｍ、長さ２００萌）に加え、実施
例１と同様にドライゲルを作製し、１１００℃まで昇温
し円筒状の焼結ゲルとした。実施例１と全く同様にゲル
マニウムエトキシドを拡散させ、マスクをはがした。続
いて、上記Ｂゾル中にこの拡散後の焼結ゲルを浸しＳｉ
０ｇ膜を形成した（クラッド層）。次にゆっくり室温で
乾燥し、７０°Ｃで３日間乾燥し、実施例１と同様の処
理で透明な石英ガラスとした。これで、実施例１と同じ
形の単一モード光導波路を外周にらせん状に形成した円
筒状の石英ガラスが得られた。(This sol is referred to as B) The above A sol and B sol were mixed and stirred, and then ammonia water was added dropwise to adjust the pH to 4.5. This sol 1.22 was added to a cylindrical container (inner diameter 2001 m, length 200 m) to prepare a dry gel in the same manner as in Example 1, and the temperature was raised to 1100° C. to form a cylindrical sintered gel. Germanium ethoxide was diffused in exactly the same manner as in Example 1, and the mask was removed. Subsequently, this sintered gel after diffusion is immersed in the above B sol and Si
A 0g film was formed (cladding layer). Next, it was slowly dried at room temperature and then at 70° C. for 3 days, and the same treatment as in Example 1 was performed to obtain transparent quartz glass. Thus, a cylindrical quartz glass having a single mode optical waveguide of the same shape as in Example 1 spirally formed around the outer periphery was obtained.

これは光ジャイロのセンシングループに使用できるもの
である。This can be used for the sensing loop of an optical gyro.

〔発明の効果〕〔Effect of the invention〕

以上述べたように本発明によれば、円筒状あるいは管状
の多孔質シリカの外側面に単一モード光導波路をアルコ
キシドの拡散により形成することにより、小型で安価な
、また量産性に優れた光ジャイロのセンシングループの
製造方法を提供するという効果を有する。As described above, according to the present invention, by forming a single-mode optical waveguide on the outer surface of cylindrical or tubular porous silica by diffusing alkoxide, it is possible to create a small, inexpensive, and mass-producible optical waveguide. The present invention has the effect of providing a method for manufacturing a gyro sensing loop.

【図面の簡単な説明】[Brief explanation of drawings]

第１図ｔａ＋〜＋ｃ＋は本発明の機略的な製造方法の工
程図である。 以　　上 出願人　セイコーエプソン株式会社 糺錫イＩ：ｌＧセ〉シン７゛１ル−アめ袈１しムハエ社
図 第１図FIG. 1 ta+ to +c+ are process diagrams of the strategic manufacturing method of the present invention. Applicant: Seiko Epson Co., Ltd.

Claims (5)

【特許請求の範囲】[Claims] （１）サブナック効果に基づく光ジャイロを以下の工程
により製造することを特徴とする光ジャイロのセンシン
グループの製造方法。 ａ）高純度の多孔質シリカ円筒管あるいは円柱体の製造
の工程。 ｂ）上記多孔質シリカ円筒管あるいは円柱体の外側面に
シングルモード導波路のらせん状のマスクを形成する工
程。 ｃ）上記マスクの上から屈折率を変える元素のアルコキ
シドあるいは、その溶液をシリカ多孔質体中に拡散させ
る工程。 ｄ）マスクをはがす工程。 ｅ）拡散後の多孔質円筒管あるいは円柱体を焼結し緻密
化する工程。(1) A method for manufacturing a sensing loop for an optical gyro, which comprises manufacturing an optical gyro based on the Subnac effect by the following steps. a) Process for producing a high purity porous silica cylindrical tube or cylinder. b) Forming a helical mask of a single mode waveguide on the outer surface of the porous silica cylindrical tube or cylindrical body. c) A step of diffusing an alkoxide of an element that changes the refractive index or a solution thereof into the porous silica material from above the mask. d) Step of peeling off the mask. e) A step of sintering and densifying the porous cylindrical tube or cylinder after diffusion. （２）高純度多孔質シリカ円筒管あるいは円柱体の製造
の工程が、少なくともアルキルシリケートあるいは微粉
末シリカを原料とするゾル−ゲル法により、ドライゲル
あるいは焼結ゲルを製造する工程であることを特徴とす
る特許請求の範囲第１項記載の光ジャイロのセンシング
ループの製造方法。(2) The process of manufacturing the high-purity porous silica cylindrical tube or cylindrical body is a process of manufacturing a dry gel or sintered gel by a sol-gel method using at least alkyl silicate or fine powder silica as a raw material. A method for manufacturing a sensing loop for an optical gyro according to claim 1. （３）高純度多孔質シリカ円筒管あるいは円柱体の製造
の工程が、四塩化ケイ素を原料とし、火炎加水分解ある
いは反応管中での熱酸化によりシリカ多孔質体とする製
法であることを特徴とする、特許請求の範囲第１項記載
の光ジャイロのセンシングループの製造方法。(3) The process of manufacturing the high-purity porous silica cylindrical tube or columnar body is characterized by using silicon tetrachloride as a raw material and producing a porous silica body by flame hydrolysis or thermal oxidation in a reaction tube. A method of manufacturing a sensing loop for an optical gyro according to claim 1. （４）光ジャイロのセンシングループの製造方法におい
て、ｄ）のマスクをはがす工程の後に、クラッド部を形
成するために、ＣＶＤ法や、ゾル−ゲル法によりシリカ
膜を形成するか、あるいは、溶剤につけることで、外側
の拡散物を除去しクラッド部を形成することを特徴とす
る特許請求の範囲第１項記載の光ジャイロのセンシング
ループの製造方法。(4) In the method for manufacturing a sensing loop for an optical gyro, after the step of removing the mask in d), a silica film is formed by a CVD method, a sol-gel method, or a solvent is used to form a cladding part. 2. The method of manufacturing a sensing loop for an optical gyro according to claim 1, wherein the cladding portion is formed by removing the outer diffused matter by attaching the sensing loop to the gyro. （５）前記ｅ）の工程において、多孔質円筒管あるいは
円柱体を７００℃〜１１００℃の間に塩素ガスを通じ脱
水酸基処理をし、８００℃〜１２００度の間に酸素ガス
を通じ脱塩素処理をし、９００℃〜１２００℃の間にヘ
リウムガスを通じながら緻密化をおこなうことを特徴と
する特許請求の範囲第１項記載の光ジャイロのセンシン
グループ。(5) In step e) above, the porous cylindrical tube or cylindrical body is subjected to dehydroxylation treatment by passing chlorine gas between 700°C and 1100°C, and dechlorination treatment is carried out by passing oxygen gas between 800°C and 1200°C. The sensing loop of an optical gyro according to claim 1, wherein densification is performed while passing helium gas between 900°C and 1200°C.
JP25817785A 1985-11-18 1985-11-18 Production of sensing loop of optical gyro Pending JPS62119130A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25817785A JPS62119130A (en) 1985-11-18 1985-11-18 Production of sensing loop of optical gyro

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25817785A JPS62119130A (en) 1985-11-18 1985-11-18 Production of sensing loop of optical gyro

Publications (1)

Publication Number Publication Date
JPS62119130A true JPS62119130A (en) 1987-05-30

Family

ID=17316591

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25817785A Pending JPS62119130A (en) 1985-11-18 1985-11-18 Production of sensing loop of optical gyro

Country Status (1)

Country Link
JP (1) JPS62119130A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4820008A (en) * 1986-11-18 1989-04-11 British Aerospace Public Limited Company Integrated optics ring resonator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4820008A (en) * 1986-11-18 1989-04-11 British Aerospace Public Limited Company Integrated optics ring resonator

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