JPS62118550U - - Google Patents

Info

Publication number
JPS62118550U
JPS62118550U JP400286U JP400286U JPS62118550U JP S62118550 U JPS62118550 U JP S62118550U JP 400286 U JP400286 U JP 400286U JP 400286 U JP400286 U JP 400286U JP S62118550 U JPS62118550 U JP S62118550U
Authority
JP
Japan
Prior art keywords
casing
robot
gas
reduced pressure
exhaust pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP400286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP400286U priority Critical patent/JPS62118550U/ja
Publication of JPS62118550U publication Critical patent/JPS62118550U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Nozzles (AREA)
JP400286U 1986-01-17 1986-01-17 Pending JPS62118550U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP400286U JPS62118550U (enrdf_load_stackoverflow) 1986-01-17 1986-01-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP400286U JPS62118550U (enrdf_load_stackoverflow) 1986-01-17 1986-01-17

Publications (1)

Publication Number Publication Date
JPS62118550U true JPS62118550U (enrdf_load_stackoverflow) 1987-07-28

Family

ID=30784273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP400286U Pending JPS62118550U (enrdf_load_stackoverflow) 1986-01-17 1986-01-17

Country Status (1)

Country Link
JP (1) JPS62118550U (enrdf_load_stackoverflow)

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