JPS61145267U - - Google Patents

Info

Publication number
JPS61145267U
JPS61145267U JP2942885U JP2942885U JPS61145267U JP S61145267 U JPS61145267 U JP S61145267U JP 2942885 U JP2942885 U JP 2942885U JP 2942885 U JP2942885 U JP 2942885U JP S61145267 U JPS61145267 U JP S61145267U
Authority
JP
Japan
Prior art keywords
temperature side
low temperature
chamber
receiving plate
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2942885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0413575Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2942885U priority Critical patent/JPH0413575Y2/ja
Publication of JPS61145267U publication Critical patent/JPS61145267U/ja
Application granted granted Critical
Publication of JPH0413575Y2 publication Critical patent/JPH0413575Y2/ja
Expired legal-status Critical Current

Links

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  • Details Of Valves (AREA)
JP2942885U 1985-02-28 1985-02-28 Expired JPH0413575Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2942885U JPH0413575Y2 (enrdf_load_stackoverflow) 1985-02-28 1985-02-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2942885U JPH0413575Y2 (enrdf_load_stackoverflow) 1985-02-28 1985-02-28

Publications (2)

Publication Number Publication Date
JPS61145267U true JPS61145267U (enrdf_load_stackoverflow) 1986-09-08
JPH0413575Y2 JPH0413575Y2 (enrdf_load_stackoverflow) 1992-03-30

Family

ID=30528225

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2942885U Expired JPH0413575Y2 (enrdf_load_stackoverflow) 1985-02-28 1985-02-28

Country Status (1)

Country Link
JP (1) JPH0413575Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0413575Y2 (enrdf_load_stackoverflow) 1992-03-30

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