JPS62118235U - - Google Patents
Info
- Publication number
- JPS62118235U JPS62118235U JP676786U JP676786U JPS62118235U JP S62118235 U JPS62118235 U JP S62118235U JP 676786 U JP676786 U JP 676786U JP 676786 U JP676786 U JP 676786U JP S62118235 U JPS62118235 U JP S62118235U
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- light
- exposure amount
- width
- shielding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP676786U JPS62118235U (lm) | 1986-01-20 | 1986-01-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP676786U JPS62118235U (lm) | 1986-01-20 | 1986-01-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62118235U true JPS62118235U (lm) | 1987-07-27 |
Family
ID=30789590
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP676786U Pending JPS62118235U (lm) | 1986-01-20 | 1986-01-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62118235U (lm) |
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1986
- 1986-01-20 JP JP676786U patent/JPS62118235U/ja active Pending