JPS62118176U - - Google Patents
Info
- Publication number
- JPS62118176U JPS62118176U JP562586U JP562586U JPS62118176U JP S62118176 U JPS62118176 U JP S62118176U JP 562586 U JP562586 U JP 562586U JP 562586 U JP562586 U JP 562586U JP S62118176 U JPS62118176 U JP S62118176U
- Authority
- JP
- Japan
- Prior art keywords
- window
- vacuum chamber
- screen
- observed
- changed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP562586U JPS62118176U (enExample) | 1986-01-17 | 1986-01-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP562586U JPS62118176U (enExample) | 1986-01-17 | 1986-01-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62118176U true JPS62118176U (enExample) | 1987-07-27 |
Family
ID=30787383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP562586U Pending JPS62118176U (enExample) | 1986-01-17 | 1986-01-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62118176U (enExample) |
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1986
- 1986-01-17 JP JP562586U patent/JPS62118176U/ja active Pending