JPS62117559U - - Google Patents

Info

Publication number
JPS62117559U
JPS62117559U JP567186U JP567186U JPS62117559U JP S62117559 U JPS62117559 U JP S62117559U JP 567186 U JP567186 U JP 567186U JP 567186 U JP567186 U JP 567186U JP S62117559 U JPS62117559 U JP S62117559U
Authority
JP
Japan
Prior art keywords
inspected
light source
light
detecting
defects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP567186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP567186U priority Critical patent/JPS62117559U/ja
Publication of JPS62117559U publication Critical patent/JPS62117559U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP567186U 1986-01-17 1986-01-17 Pending JPS62117559U (US07709020-20100504-C00041.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP567186U JPS62117559U (US07709020-20100504-C00041.png) 1986-01-17 1986-01-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP567186U JPS62117559U (US07709020-20100504-C00041.png) 1986-01-17 1986-01-17

Publications (1)

Publication Number Publication Date
JPS62117559U true JPS62117559U (US07709020-20100504-C00041.png) 1987-07-25

Family

ID=30787473

Family Applications (1)

Application Number Title Priority Date Filing Date
JP567186U Pending JPS62117559U (US07709020-20100504-C00041.png) 1986-01-17 1986-01-17

Country Status (1)

Country Link
JP (1) JPS62117559U (US07709020-20100504-C00041.png)

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