JPS62116547U - - Google Patents

Info

Publication number
JPS62116547U
JPS62116547U JP324586U JP324586U JPS62116547U JP S62116547 U JPS62116547 U JP S62116547U JP 324586 U JP324586 U JP 324586U JP 324586 U JP324586 U JP 324586U JP S62116547 U JPS62116547 U JP S62116547U
Authority
JP
Japan
Prior art keywords
storage
sides
pair
pieces
guide rail
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP324586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP324586U priority Critical patent/JPS62116547U/ja
Publication of JPS62116547U publication Critical patent/JPS62116547U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP324586U 1986-01-14 1986-01-14 Pending JPS62116547U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP324586U JPS62116547U (enExample) 1986-01-14 1986-01-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP324586U JPS62116547U (enExample) 1986-01-14 1986-01-14

Publications (1)

Publication Number Publication Date
JPS62116547U true JPS62116547U (enExample) 1987-07-24

Family

ID=30782828

Family Applications (1)

Application Number Title Priority Date Filing Date
JP324586U Pending JPS62116547U (enExample) 1986-01-14 1986-01-14

Country Status (1)

Country Link
JP (1) JPS62116547U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03185718A (ja) * 1989-12-14 1991-08-13 Nec Corp 半導体ウェハー熱処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03185718A (ja) * 1989-12-14 1991-08-13 Nec Corp 半導体ウェハー熱処理装置

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