JPS62116238A - X-ray ct apparatus - Google Patents
X-ray ct apparatusInfo
- Publication number
- JPS62116238A JPS62116238A JP60255048A JP25504885A JPS62116238A JP S62116238 A JPS62116238 A JP S62116238A JP 60255048 A JP60255048 A JP 60255048A JP 25504885 A JP25504885 A JP 25504885A JP S62116238 A JPS62116238 A JP S62116238A
- Authority
- JP
- Japan
- Prior art keywords
- ray tube
- ray
- detector
- interval
- detection elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 abstract description 17
- 238000005070 sampling Methods 0.000 abstract description 14
- 230000004304 visual acuity Effects 0.000 abstract 2
- 238000000034 method Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 241000231739 Rutilus rutilus Species 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
- G01N23/046—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using tomography, e.g. computed tomography [CT]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/40—Imaging
- G01N2223/419—Imaging computed tomograph
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は産業用、例えば半導体チップの内部断線などの
検査用に好適なＸｆｆ５ＣＴ装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to an Xff5CT apparatus suitable for industrial use, for example, for inspecting internal disconnections in semiconductor chips.
Ｘ＠ＣＴ装置の空間分解能を高めるためには、Ｘ線検出
器のチャンネル数（検出素子数）を増加させて被検体情
報のサンプリング点を増やす方法が考えられる。しかし
この方法では、チャンネル数の増加に伴いチャンネル隔
壁などによるデッド２−頁
スペースが増加してＸ線利用効率が低下し、また検出回
路のコストが上昇するなどの問題点があった。In order to increase the spatial resolution of the X@CT apparatus, one possible method is to increase the number of channels (the number of detection elements) of the X-ray detector to increase the number of sampling points for object information. However, this method has problems, such as an increase in the number of channels and an increase in dead page space due to channel partition walls, resulting in a decrease in X-ray utilization efficiency and an increase in the cost of the detection circuit.
そこで、Ｘ線焦点に対してＸ線検出器をｘチャンネル分
だけずらして配置した、オフセット検出器システムなる
方法が考えられた。これによれば、検出器のチャンネル
数を増やさずにサンプリング点を２倍に増やすことがで
きるものの、それ以上、例えば３倍、４倍に増やすこと
はできず、したがってそれ以上に空間分解能を向上する
ことができないという問題点があった。Therefore, a method called an offset detector system was devised, in which the X-ray detector is shifted by the amount of x channel with respect to the X-ray focal point. According to this, although it is possible to double the number of sampling points without increasing the number of detector channels, it is not possible to increase the sampling points further, for example, by a factor of 3 or 4, and therefore the spatial resolution can be further improved. The problem was that it could not be done.
本発明は上記のような問題点を解消するためになされた
もので、Ｘ線検出器のチャンネル数を増やさずにサンプ
リング点を２倍以上増やすことができ、よシ以上に空間
分解能を高めることができるＸ線ＣＴ装置を提供するこ
とを目的とする。The present invention was made to solve the above-mentioned problems, and it is possible to more than double the number of sampling points without increasing the number of channels of the X-ray detector, and to further improve the spatial resolution. The purpose is to provide an X-ray CT device that can perform
本発明は、Ｘ線管と多数の検出素子を配列してなるＸ線
検出器との相対的位置を、前記検出素子−−−−−３−
−−頁
の配列方向にその検出素子間隔の範囲内の任意の距離だ
け移動設定自在に構成したもので、これによシ１スキャ
ン毎に前記Ｘ線管又は（及び）Ｘ線検出器を微量移動さ
せながら複数回スキャンし、サンプリング点をスキャン
回数だけ増加可能とし、上述目的を達成するようにした
ものである。According to the present invention, the relative position between an X-ray tube and an X-ray detector formed by arranging a large number of detection elements can be determined by
--It is configured so that it can be set to move an arbitrary distance within the range of the detection element spacing in the page arrangement direction, thereby allowing the X-ray tube or (and) X-ray detector to be The above object is achieved by scanning multiple times while moving and increasing the number of sampling points by the number of scans.
以下図面を参照して本発明の詳細な説明する。 The present invention will be described in detail below with reference to the drawings.
第１図は本発明によるＸ線ＣＴ装置の一実施例の要部を
示す正面図で、図中１はＸ線管、２はこのＸ線管１に被
検体３を挾んで対向配置されたＸ線検出器である。ここ
ではＸ線検出器２として、多数の半導体よりなる検出素
子２ａを直線状に配列してなるものを例示している。こ
の検出器２と前記Ｘ線管１は図示しない回転板の同一平
面上に設けられ、被検体３の周囲を例えば矢印イ方向に
両者一体に回転可能である。FIG. 1 is a front view showing the main parts of an embodiment of the X-ray CT apparatus according to the present invention, in which 1 is an X-ray tube, and 2 is an X-ray tube 1 placed opposite to the X-ray tube 1 with a subject 3 in between. It is an X-ray detector. Here, as the X-ray detector 2, one in which a large number of detection elements 2a made of semiconductors are arranged in a straight line is illustrated. The detector 2 and the X-ray tube 1 are provided on the same plane of a rotating plate (not shown), and can rotate together around the subject 3, for example, in the direction of arrow A.
４はＸ線管１を支持する支持台、５は一端が支持台４に
連結されたねじ、６はこのねじ５の他端に回転軸が連結
されたステツブモータで、これらはＸ線管１（より詳し
くはＸ線管１の焦点）の移動機構を構成する。すなわち
この移動機構は、ステツブモータ６の正、逆転によって
ねじ５及び支持台４を介し、Ｘ線管１を、前記検出器２
の検出素子２ａの配列方向（矢印口方向）に、その検出
素子間隔（チャンネル間隔）ｄの範囲内の任意の距離だ
け移動するように構成されている。そして実際に計測動
作するときには、ｌスキャン毎にＸ線管１を前記間隔ｄ
の範囲内の所定距離（ここでは％）だけ移動させる。Reference numeral 4 denotes a support base that supports the X-ray tube 1; 5 is a screw whose one end is connected to the support base 4; 6 is a step motor whose rotating shaft is connected to the other end of this screw 5; More specifically, it constitutes a movement mechanism for the focal point of the X-ray tube 1. That is, this moving mechanism moves the X-ray tube 1 to the detector 2 via the screw 5 and the support base 4 by forward and reverse rotation of the step motor 6.
It is configured to move in the arrangement direction of the detection elements 2a (arrow direction) by an arbitrary distance within the range of the detection element spacing (channel spacing) d. When actually performing a measurement operation, the X-ray tube 1 is moved at the distance d for every l scan.
The object is moved by a predetermined distance (here, %) within the range of .
次に上述本発明装置について説明する。捷ず図示状態か
ら回転板（図示せず）を矢印イ方向に１８００回転させ
、その間、所定の回転角毎に扇状Ｘ線７をＸ線管１から
照射して第１回目のスキャン（計測）を終了する。第１
回目の計測が終了すると、Ｘ線管１は前記移動機構によ
って矢印口の例えば右方向へ前記間隔ｄの％（−ｄ／４
）だけ移動し、静止後、上述と同様のスキャンを再度行
う。以後同様にＸ線管１の移動とスキャンを２回繰如返
し、合計４回、Ｘ線管１が右方向に％ずつ移動した位〜
−−一−−−−−頁
置でのスキャンを行う。Next, the above-mentioned device of the present invention will be explained. The rotary plate (not shown) is rotated 1800 times in the direction of arrow A from the state shown in the figure, and during that time, fan-shaped X-rays 7 are irradiated from the X-ray tube 1 at every predetermined rotation angle for the first scan (measurement). end. 1st
When the first measurement is completed, the X-ray tube 1 is moved by the moving mechanism, for example, to the right of the arrow opening by % (-d/4) of the distance d.
), and after coming to rest, perform the same scan as above again. After that, the X-ray tube 1 was moved and scanned twice in the same way, and the X-ray tube 1 moved % to the right for a total of 4 times.
---------- Perform scanning at the page position.
第２図はＸ線管１とＸ線検出器２の相対的位置が変化し
ない従来装置における所定の回転角での被検体情報（真
値）８に対するサンプリング点９を示したもので、図か
ら分かるようにサンプリング点９の間隔は検出素子間隔
（チャンネル間隔）ｄとなる。一方第３図は上述本発明
装置における上記被検体情報８に対する４スキャン分の
サンプリング点Ａ、Ｂ、Ｃ，Ｄ（Ａは第１回目の、Ｂは
第２回目の、Ｃは第３回目の、Ｄは第４回目の、各スキ
ャン時のサンプリング点）を示したものである。これに
よればサンプリング点（Ａ−Ｄ）の各間隔は前記間隔ｄ
の將（＝％）となシ、従来装置の４倍のすｙノリング点
が得られ、それに応じて空間分解能が高められる。Figure 2 shows sampling points 9 for object information (true value) 8 at a predetermined rotation angle in a conventional device in which the relative positions of the X-ray tube 1 and the X-ray detector 2 do not change. As can be seen, the interval between the sampling points 9 is the detection element interval (channel interval) d. On the other hand, FIG. 3 shows sampling points A, B, C, and D for four scans for the subject information 8 in the apparatus of the present invention (A is the first scan, B is the second scan, and C is the third scan). , D indicates the sampling point at the time of the fourth scan. According to this, each interval of sampling points (A-D) is the interval d
As a result, four times as many points as the conventional device can be obtained, and the spatial resolution can be increased accordingly.
なお上述実施例では、Ｘ線検出器２としてその検出素子
２ａを直線状に配列したものを用いた場合について説明
したが、円弧状に配列したものを用いてもよい。この場
合、Ｘ線管１をその円弧に沿って移動するようにしても
、又は上述実施例と同一、、、−、−、，１ｊ−一百
様に矢印口方向に直線移動するようにしてもよい。In the above-mentioned embodiment, a case has been described in which the X-ray detector 2 has its detection elements 2a arranged in a straight line, but an arrangement in an arc shape may also be used. In this case, the X-ray tube 1 may be moved along its arc, or may be moved linearly in the direction of the arrow in the same manner as in the above embodiment. Good too.
いずれにしても、Ｘ線管１からみて検出素子２ａの配列
方向に移動するようにすればよい。検出器２０種類も半
導体検出器のみに限定されることはない。In any case, it is sufficient to move in the direction in which the detection elements 2a are arranged when viewed from the X-ray tube 1. The 20 types of detectors are not limited to only semiconductor detectors.
また上述実施例ではＸ線管ｌをＸ線検出器２に対して移
動するように構成したが、検出器２側又はそれら双方を
移動するように構成してもよい。Further, in the above-described embodiment, the X-ray tube 1 is configured to be moved relative to the X-ray detector 2, but the X-ray tube 1 may be configured to be moved on the detector 2 side or both of them.
撮影方式も上述したように扇状Ｘ線７を用いたローテー
ト／ローチー）（Ｒ−Ｒ）方式に限られず、扇状Ｘ線７
又はペンシルビームを用いたトランスレート／ローチー
）（Ｔ−１１）方式を用いてもよい。The imaging method is not limited to the rotate/roach (R-R) method using the fan-shaped X-ray 7 as described above;
Alternatively, a Translate/Loachy (T-11) method using a pencil beam may be used.
さらに本発明は、医用及び半導体チッグの内部検査など
の産業用のいずれにも適用できる。この場合、本発明装
置によシ空間分解能を高めるためにはスキャン数が２回
以上となるので、Ｘ線照射量や体動などの問題が生じな
い産業用として特に好適する。Further, the present invention can be applied to both medical and industrial applications such as internal inspection of semiconductor chips. In this case, in order to improve the spatial resolution of the apparatus of the present invention, the number of scans is two or more, so it is particularly suitable for industrial use where problems such as the amount of X-ray irradiation and body movement do not occur.
−−−−−η−−−頁
以上述べたように本発明によれば、Ｘ線検出器のチャン
ネル数（検出素子数）を増やさずにサンプリング点を従
来装置に比べて２倍以上増やすことができるので、Ｘ線
利用効率を低下させたり、検出回路のコストを上昇させ
ることなく空間分解能を大幅に高めることができるとい
う効果が得られる。-------η----Page As described above, according to the present invention, the number of sampling points can be increased by more than twice compared to the conventional device without increasing the number of channels (the number of detection elements) of the X-ray detector. Therefore, it is possible to obtain the effect that the spatial resolution can be significantly increased without reducing the X-ray utilization efficiency or increasing the cost of the detection circuit.
第１図は本発明装置の一実施例の要部を示す正面図、第
２図は従来装置によるサンシリング点を示す図、第３図
は本発明装置によるサンプリング点の一例を示す図であ
る。
１・・・Ｘ線管、２・・・Ｘ線検出器、２ａ・・・検出
素子、３・・・被検体、ｄ・・・検出素子間隔（チャン
ネル間隔）。
特許出願人 株式会社 日立メディコ代 理 人
弁理士 秋 本 正 実第１図FIG. 1 is a front view showing essential parts of an embodiment of the device of the present invention, FIG. 2 is a diagram showing sampling points by a conventional device, and FIG. 3 is a diagram showing an example of sampling points by the device of the present invention. . DESCRIPTION OF SYMBOLS 1... X-ray tube, 2... X-ray detector, 2a... Detection element, 3... Subject, d... Detection element spacing (channel spacing). Patent applicant Hitachi Medical Co., Ltd. Agent
Patent Attorney Tadashi Akimoto Figure 1
Claims (1)
子を配列してなるＸ線検出器とを、それらの相対的位置
を、前記検出素子の配列方向にその検出素子間隔の範囲
内の任意の距離だけ移動設定自在に構成したことを特徴
とするＸ線ＣＴ装置。The relative positions of an X-ray tube and an X-ray detector arranged opposite to the X-ray tube and consisting of a large number of detecting elements arranged in the arrangement direction of the detecting elements are determined by the distance between the detecting elements. An X-ray CT apparatus characterized in that it is configured to be movable by any desired distance within the range.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60255048A JPH0678993B2 (en) | 1985-11-15 | 1985-11-15 | X-ray CT system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60255048A JPH0678993B2 (en) | 1985-11-15 | 1985-11-15 | X-ray CT system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62116238A true JPS62116238A (en) | 1987-05-27 |
| JPH0678993B2 JPH0678993B2 (en) | 1994-10-05 |
Family
ID=17273433
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60255048A Expired - Lifetime JPH0678993B2 (en) | 1985-11-15 | 1985-11-15 | X-ray CT system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0678993B2 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06100451B2 (en) * | 1987-10-30 | 1994-12-12 | フォー・ピー・アイ・システムズ・コーポレーション | Automatic laminograph system for electronics inspection. |
| US5561696A (en) * | 1987-10-30 | 1996-10-01 | Hewlett-Packard Company | Method and apparatus for inspecting electrical connections |
| US5583904A (en) * | 1995-04-11 | 1996-12-10 | Hewlett-Packard Co. | Continuous linear scan laminography system and method |
| US5621811A (en) * | 1987-10-30 | 1997-04-15 | Hewlett-Packard Co. | Learning method and apparatus for detecting and controlling solder defects |
| US5687209A (en) * | 1995-04-11 | 1997-11-11 | Hewlett-Packard Co. | Automatic warp compensation for laminographic circuit board inspection |
| JP2010213891A (en) * | 2009-03-17 | 2010-09-30 | Ge Medical Systems Global Technology Co Llc | X-ray computer tomography apparatus |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5071285A (en) * | 1973-07-21 | 1975-06-13 | ||
| JPS6145901U (en) * | 1984-08-27 | 1986-03-27 | 株式会社島津製作所 | X-ray computer tomography device |
-
1985
- 1985-11-15 JP JP60255048A patent/JPH0678993B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5071285A (en) * | 1973-07-21 | 1975-06-13 | ||
| JPS6145901U (en) * | 1984-08-27 | 1986-03-27 | 株式会社島津製作所 | X-ray computer tomography device |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06100451B2 (en) * | 1987-10-30 | 1994-12-12 | フォー・ピー・アイ・システムズ・コーポレーション | Automatic laminograph system for electronics inspection. |
| US5561696A (en) * | 1987-10-30 | 1996-10-01 | Hewlett-Packard Company | Method and apparatus for inspecting electrical connections |
| US5621811A (en) * | 1987-10-30 | 1997-04-15 | Hewlett-Packard Co. | Learning method and apparatus for detecting and controlling solder defects |
| US5583904A (en) * | 1995-04-11 | 1996-12-10 | Hewlett-Packard Co. | Continuous linear scan laminography system and method |
| US5687209A (en) * | 1995-04-11 | 1997-11-11 | Hewlett-Packard Co. | Automatic warp compensation for laminographic circuit board inspection |
| JP2010213891A (en) * | 2009-03-17 | 2010-09-30 | Ge Medical Systems Global Technology Co Llc | X-ray computer tomography apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0678993B2 (en) | 1994-10-05 |
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