JPS6211557U - - Google Patents
Info
- Publication number
- JPS6211557U JPS6211557U JP1985102595U JP10259585U JPS6211557U JP S6211557 U JPS6211557 U JP S6211557U JP 1985102595 U JP1985102595 U JP 1985102595U JP 10259585 U JP10259585 U JP 10259585U JP S6211557 U JPS6211557 U JP S6211557U
- Authority
- JP
- Japan
- Prior art keywords
- surface plate
- rapping
- wafer
- ceramics
- coefficient
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985102595U JPS6211557U (zh) | 1985-07-04 | 1985-07-04 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985102595U JPS6211557U (zh) | 1985-07-04 | 1985-07-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6211557U true JPS6211557U (zh) | 1987-01-24 |
Family
ID=30974384
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985102595U Pending JPS6211557U (zh) | 1985-07-04 | 1985-07-04 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6211557U (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0487768A (ja) * | 1990-07-27 | 1992-03-19 | Noritake Co Ltd | 硬脆性材料ラッピング方法および装置 |
JPH0549252U (ja) * | 1991-12-05 | 1993-06-29 | 日本鋳造株式会社 | 研磨機用定盤 |
-
1985
- 1985-07-04 JP JP1985102595U patent/JPS6211557U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0487768A (ja) * | 1990-07-27 | 1992-03-19 | Noritake Co Ltd | 硬脆性材料ラッピング方法および装置 |
JPH0549252U (ja) * | 1991-12-05 | 1993-06-29 | 日本鋳造株式会社 | 研磨機用定盤 |