JPS63195736U - - Google Patents
Info
- Publication number
- JPS63195736U JPS63195736U JP8769487U JP8769487U JPS63195736U JP S63195736 U JPS63195736 U JP S63195736U JP 8769487 U JP8769487 U JP 8769487U JP 8769487 U JP8769487 U JP 8769487U JP S63195736 U JPS63195736 U JP S63195736U
- Authority
- JP
- Japan
- Prior art keywords
- shielding plate
- wafer carrier
- utility
- scope
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 9
- 238000005192 partition Methods 0.000 claims 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000012050 conventional carrier Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8769487U JPS63195736U (zh) | 1987-06-05 | 1987-06-05 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8769487U JPS63195736U (zh) | 1987-06-05 | 1987-06-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63195736U true JPS63195736U (zh) | 1988-12-16 |
Family
ID=30945136
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8769487U Pending JPS63195736U (zh) | 1987-06-05 | 1987-06-05 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63195736U (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004049430A1 (ja) * | 2002-11-26 | 2004-06-10 | Disco Corporation | 複数枚の半導体ウエーハを収容するためのカセット |
-
1987
- 1987-06-05 JP JP8769487U patent/JPS63195736U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004049430A1 (ja) * | 2002-11-26 | 2004-06-10 | Disco Corporation | 複数枚の半導体ウエーハを収容するためのカセット |