JPS6211536A - Bubbler vessel for organic metal - Google Patents

Abstract

PURPOSE:To prevent the backflow of organic metal into a pipeline of an apparatus by communicating mutually the dipping tubes which are incorporated in two comparted chambers in the position at least higher than the liquid level of organic metal to be packed in a vessel. CONSTITUTION:When a bubbler vessel main body 11 of organic metal is connected to a pipeline of an apparatus and the pressure of an inlet side is made lower than the pressure of an outlet side, organic metal 6 transfers to a chamber A from a chamber B but is not back-flowed into the pipeline of the upper part through a valve 5A of the chamber A and collects in the bottom of the chamber A. Again when the pressure of the inlet side is made higher than the pressure of the outlet side, organic metal returns to the chamber B through the dipping tubes 3A, 3B. In this case, several organic metal 6 remains in the chamber A but when the distance between the tip of the dipping tube 3A and the bottom of the vessel is made extremely small, the remaining amount is a very small quantity and is accompanied with the flow of a carrier gas in the ordinary operation and this is made to vapor and disappears for a short time.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an organometallic bubbler container used in an organometallic decomposition growth method (hereinafter referred to as MDCVD method).

[Conventional technology]

The MOCVD method is one of the crystal growth methods often used in the production of semiconductor devices, and the organometallic bubbler container is one of the important parts of the growth apparatus.

An example of a conventional organometallic bubbler container is shown in FIG. 3, and a conventional organometallic bubbler container main body 11 is composed of one chamber,
An organic metal 12 is loaded therein, and the interior of the container body 11 has a dipping tube 13 that reaches below the liquid level of the organic gold Gtz. The upper end of the dipping tube 13 extends outside the container via a valve 14.

Also, a tube 15 communicating with the upper space of the container body 11
extends outside the container, and the tube 15 is also provided with a valve 16. FIG. 2 is an example of a piping system diagram when an organometallic bubbler container is connected to the device.

In order to perform crystal growth with high reproducibility, the piping PI-Px connected to each tube 13 and 15 in the upper part 1 of the container body.
- It is necessary to prevent backflow of organic raw materials to Ps,
The pressure relationship between the inlet and outlet of the container body 110 must be controlled at all times so that the inlet side does not become lower than the outlet side. 4 spontaneously ignites in the air and burns very violently. Therefore, when the organometallic bubbler container is removed, if there is any organometallic material flowing back into the pipes P1 to Pg, it will come into contact with the air and ignite and burn, which is very dangerous.

[Problem that the invention seeks to solve]

Of course, this problem will not occur unless the organic metal is allowed to flow back into the piping, but the valves are operated by humans, and there is a possibility that errors may occur. In addition, the pipes P1 to P at the top of the container body 11 are often evacuated for operational purposes, but in this case, the valve 14 connected to the dipping tube 13 in Fig. 3 is repeatedly opened and closed, causing leakage. If this occurs, the organometallic material will easily flow backwards, inhibiting the production of crystal growth with high reproducibility, and this is extremely dangerous if the organometallic bubbler container is removed. An object of the present invention is to provide a structure of an organometallic bubbler container having a structure in which the organometallic inside the organometallic bubbler container does not flow back into the equipment piping even when the organometallic bubbler container is in use.

[Means for solving problems]

In the present invention, the interior of the container is divided into two chambers, each chamber is equipped with a dipping tube, and both dipping tubes are communicated with each other at least at a position higher than the liquid level of the organic metal to be filled in the container. The organometallic bubbler container is characterized in that tubes communicating with the upper space are extended outside the container, each tube is provided with a valve, and only one of the two chambers is filled with the organometallic.

〔Example〕

Examples of the present invention are shown below.

FIG. 1 is a sectional view of the organometallic bubbler container of the present invention. The shape of the container may be cylindrical or prismatic.

The interior of the container body 1 has two compartments A separated by a central partition 2.

Dipping tubes 3 and 3B are inserted into each of the two chambers B and communicated with each other through the partition 2. The dipping tube 3Ar 3
n is connected through a partition 2 at a portion higher than the liquid level of the organic metal 10 to be filled in the container body 1, and extends near the bottoms of both chambers A and H to open them. On the other hand, each room A
, B each have a tube 4 connected to the upper space of the room.
A I 4 B is extended, and each tube 4A, 4B is provided with a valve 5A, 5B, respectively. The organic metal 6 is loaded only into one of the two chambers A and B, for example, chamber B. The upper pulp 5B on the side loaded with the organic metal 6 serves as an outlet valve, and the other serves as an inlet valve.

The organometallic bubbler container of the present invention is connected to the piping of the apparatus in the same manner as in FIG. At that time, when the pressure on the inlet side becomes lower than the pressure on the outlet side, the organometallic 6 moves from chamber B to chamber A, but
A does not flow back to the upper pipe through the chamber valve 5A.
Collects at the bottom of the chamber. If the pressure on the inlet side is made higher than that on the outlet side again, it returns to chamber B through the dipping tubes 3A and 3Bfc. At this time, some organic metal 6 remains in chamber A, but if the distance between the tip of the dipping tube 3A and the bottom of the container is made as small as possible, the amount remaining is very small, and the organic raw material remaining in chamber A grows into crystals. It does not have any adverse effect on the carrier gas, and during normal operation, it rides on the flow of carrier gas, turns into steam, and disappears in a short time. Even if the pressure on the inlet side is lower than that on the outlet side due to water leakage, etc., there will be no backflow to the upper piping of the bubbler.
In addition, the inside of the organometallic bubbler container can be returned to its normal state by easily increasing the pressure on the inlet side to be higher than the pressure on the outlet side.

As described above, the organometallic bubbler container of the present invention can prevent backflow and is highly safe.

[Brief explanation of the drawing]

FIG. 1 is a sectional view of the organometallic bubbler container of the present invention, and FIG.
The figure shows an example of a piping system diagram when an organometallic bubbler container is connected to an apparatus, and FIG. 3 is a sectional view of a conventional organometallic bubbler container. 1... Container body, 2... Partition, 3A, 3B...
Dipping tube, 4A#4B...Tube, 5
A, 5B...Valve, 6...Organic metal, A, B...
・Patent applicant: NEC Corporation Figure 2

Claims (1)

[Claims] (1) The inside of the container is divided into two chambers, each chamber is equipped with a dewatering tube, and both dewatering tubes are communicated with each other at least at a position higher than the liquid level of the organic metal to be filled in the container. An organometallic bubbler container characterized in that a tube communicating with the upper space of the chamber is extended outside the container, a valve is interposed in each tube, and only one of the two chambers is filled with an organic metal.