JPS62115112U - - Google Patents

Info

Publication number
JPS62115112U
JPS62115112U JP20178285U JP20178285U JPS62115112U JP S62115112 U JPS62115112 U JP S62115112U JP 20178285 U JP20178285 U JP 20178285U JP 20178285 U JP20178285 U JP 20178285U JP S62115112 U JPS62115112 U JP S62115112U
Authority
JP
Japan
Prior art keywords
pressure
introduction
chamber
detection chamber
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20178285U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0435780Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985201782U priority Critical patent/JPH0435780Y2/ja
Publication of JPS62115112U publication Critical patent/JPS62115112U/ja
Application granted granted Critical
Publication of JPH0435780Y2 publication Critical patent/JPH0435780Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Supply Devices, Intensifiers, Converters, And Telemotors (AREA)
  • Measuring Fluid Pressure (AREA)
JP1985201782U 1985-12-26 1985-12-26 Expired JPH0435780Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985201782U JPH0435780Y2 (enExample) 1985-12-26 1985-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985201782U JPH0435780Y2 (enExample) 1985-12-26 1985-12-26

Publications (2)

Publication Number Publication Date
JPS62115112U true JPS62115112U (enExample) 1987-07-22
JPH0435780Y2 JPH0435780Y2 (enExample) 1992-08-25

Family

ID=31165556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985201782U Expired JPH0435780Y2 (enExample) 1985-12-26 1985-12-26

Country Status (1)

Country Link
JP (1) JPH0435780Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010112946A (ja) * 2008-10-23 2010-05-20 Asml Holding Nv 流体支援ガスゲージ近接センサ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5739331A (en) * 1980-08-22 1982-03-04 Yokogawa Hokushin Electric Corp Differential pressure and pressure detector

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5739331A (en) * 1980-08-22 1982-03-04 Yokogawa Hokushin Electric Corp Differential pressure and pressure detector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010112946A (ja) * 2008-10-23 2010-05-20 Asml Holding Nv 流体支援ガスゲージ近接センサ

Also Published As

Publication number Publication date
JPH0435780Y2 (enExample) 1992-08-25

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