JPS62115112U - - Google Patents

Info

Publication number
JPS62115112U
JPS62115112U JP20178285U JP20178285U JPS62115112U JP S62115112 U JPS62115112 U JP S62115112U JP 20178285 U JP20178285 U JP 20178285U JP 20178285 U JP20178285 U JP 20178285U JP S62115112 U JPS62115112 U JP S62115112U
Authority
JP
Japan
Prior art keywords
pressure
introduction
chamber
detection chamber
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20178285U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0435780Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985201782U priority Critical patent/JPH0435780Y2/ja
Publication of JPS62115112U publication Critical patent/JPS62115112U/ja
Application granted granted Critical
Publication of JPH0435780Y2 publication Critical patent/JPH0435780Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Supply Devices, Intensifiers, Converters, And Telemotors (AREA)
  • Measuring Fluid Pressure (AREA)
JP1985201782U 1985-12-26 1985-12-26 Expired JPH0435780Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985201782U JPH0435780Y2 (enrdf_load_stackoverflow) 1985-12-26 1985-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985201782U JPH0435780Y2 (enrdf_load_stackoverflow) 1985-12-26 1985-12-26

Publications (2)

Publication Number Publication Date
JPS62115112U true JPS62115112U (enrdf_load_stackoverflow) 1987-07-22
JPH0435780Y2 JPH0435780Y2 (enrdf_load_stackoverflow) 1992-08-25

Family

ID=31165556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985201782U Expired JPH0435780Y2 (enrdf_load_stackoverflow) 1985-12-26 1985-12-26

Country Status (1)

Country Link
JP (1) JPH0435780Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010112946A (ja) * 2008-10-23 2010-05-20 Asml Holding Nv 流体支援ガスゲージ近接センサ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5739331A (en) * 1980-08-22 1982-03-04 Yokogawa Hokushin Electric Corp Differential pressure and pressure detector

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5739331A (en) * 1980-08-22 1982-03-04 Yokogawa Hokushin Electric Corp Differential pressure and pressure detector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010112946A (ja) * 2008-10-23 2010-05-20 Asml Holding Nv 流体支援ガスゲージ近接センサ

Also Published As

Publication number Publication date
JPH0435780Y2 (enrdf_load_stackoverflow) 1992-08-25

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