JPS62115028U - - Google Patents

Info

Publication number
JPS62115028U
JPS62115028U JP228486U JP228486U JPS62115028U JP S62115028 U JPS62115028 U JP S62115028U JP 228486 U JP228486 U JP 228486U JP 228486 U JP228486 U JP 228486U JP S62115028 U JPS62115028 U JP S62115028U
Authority
JP
Japan
Prior art keywords
air
air supply
supply chamber
work area
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP228486U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0233050Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP228486U priority Critical patent/JPH0233050Y2/ja
Publication of JPS62115028U publication Critical patent/JPS62115028U/ja
Application granted granted Critical
Publication of JPH0233050Y2 publication Critical patent/JPH0233050Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Central Air Conditioning (AREA)
  • Ventilation (AREA)
JP228486U 1986-01-10 1986-01-10 Expired JPH0233050Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP228486U JPH0233050Y2 (https=) 1986-01-10 1986-01-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP228486U JPH0233050Y2 (https=) 1986-01-10 1986-01-10

Publications (2)

Publication Number Publication Date
JPS62115028U true JPS62115028U (https=) 1987-07-22
JPH0233050Y2 JPH0233050Y2 (https=) 1990-09-06

Family

ID=30780982

Family Applications (1)

Application Number Title Priority Date Filing Date
JP228486U Expired JPH0233050Y2 (https=) 1986-01-10 1986-01-10

Country Status (1)

Country Link
JP (1) JPH0233050Y2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6475833A (en) * 1987-09-14 1989-03-22 Takenaka Komuten Co Locally circulated type clean room

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6475833A (en) * 1987-09-14 1989-03-22 Takenaka Komuten Co Locally circulated type clean room

Also Published As

Publication number Publication date
JPH0233050Y2 (https=) 1990-09-06

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