JPS62114461A - Linear pulse motor - Google Patents

Linear pulse motor

Info

Publication number
JPS62114461A
JPS62114461A JP25185085A JP25185085A JPS62114461A JP S62114461 A JPS62114461 A JP S62114461A JP 25185085 A JP25185085 A JP 25185085A JP 25185085 A JP25185085 A JP 25185085A JP S62114461 A JPS62114461 A JP S62114461A
Authority
JP
Japan
Prior art keywords
magnetic
recesses
rugged
stator
rows
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP25185085A
Other languages
Japanese (ja)
Inventor
Hiroki Murayama
裕樹 村山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP25185085A priority Critical patent/JPS62114461A/en
Publication of JPS62114461A publication Critical patent/JPS62114461A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To enhance a static thrust and precision, by forming two rugged rows of a stator with positionally shifted phase, and by arranging the rows in a specific manner. CONSTITUTION:A mover 1 is organized with a permanent magnet 2, U-formed magnetic members 3, 4 fitted on the both sides of the magnet 2, and exciting coils 5, 6 wound up respectively on the members 3, 4. On a stator 8, two rugged rows 9, 10 shifted positionally by 1/4 pitch (phase, 90 deg.) against one pitch of the rugged sections are formed. The rugged rows 9, 10 consist of a plurality of concave sections and convex sections repeated at a specified pitch. Besides, on the mover 1, vertically to the advancing direction, the magnetic member 3, the permanent magnet 2, and the magnetic member 4 are arranged, and the rugged section of the magnetic member 3 approaches the confronts the rugged row 9 and the rugged section of the magnetic member 4 approaches the confronts the rugged row 10, respectively. Then, the unbalance of a magnetic circuit between magnetic pole teeth is remedied, and the distortion or the like of the mover 1 can be eliminated.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、人力パルスに応じて可動子がある距離だけ移
動するリニアパルスモータに関する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a linear pulse motor in which a mover moves a certain distance in response to a human pulse.

〔従来の技術〕[Conventional technology]

第2図に従来のリニアパルスモータの概略図を示す。可
動子20は、凹凸が形成され低抗磁力で高飽和磁束密度
を有する磁性材21及び22と、その間に装着され磁化
23のように着磁された永久磁石24と、磁性材21.
22にそれぞれ巻装された励磁コイル25.26とから
構成されている。磁性材21.22及び永久磁石24は
可動子20の進行方向に並ぶように配列されている。一
方、固定子27は、可動子20の磁性材21.22に対
応した1列の凹凸28が形成され低抗磁力で高飽和磁束
密度を有する磁性材で構成されている。可動子20の凹
凸は、固定子27の凹凸列28との組み合わせにより所
望のステップピッチを得るように形成されている。
FIG. 2 shows a schematic diagram of a conventional linear pulse motor. The movable element 20 includes magnetic materials 21 and 22 that are formed with unevenness and have low coercive force and high saturation magnetic flux density, a permanent magnet 24 mounted between them and magnetized like magnetization 23, and magnetic materials 21 and 22.
22 and excitation coils 25 and 26 wound respectively. The magnetic materials 21 and 22 and the permanent magnets 24 are arranged in the direction in which the mover 20 moves. On the other hand, the stator 27 is formed with a row of concavities and convexities 28 corresponding to the magnetic materials 21 and 22 of the movable element 20, and is made of a magnetic material having low coercive force and high saturation magnetic flux density. The unevenness of the movable element 20 is formed in combination with the unevenness row 28 of the stator 27 to obtain a desired step pitch.

第3図は、第2図に示した従来のリニアパルスモータの
動作原理を示すための断面図である。励磁コイル25は
磁性材21の凸部を構成する磁極歯■と■との極性が互
いに逆向きとなるように接続されている。同様に、励磁
コイル26は磁性材22の凸部を構成する磁極歯■と■
との極性が互いに逆向きになるように接続されている。
FIG. 3 is a sectional view showing the operating principle of the conventional linear pulse motor shown in FIG. 2. The excitation coil 25 is connected so that the polarities of the magnetic pole teeth (2) and (2) constituting the convex portion of the magnetic material 21 are opposite to each other. Similarly, the excitation coil 26 is connected to the magnetic pole teeth ■ and ■ constituting the convex portion of the magnetic material 22.
are connected so that their polarities are opposite to each other.

磁性材21で励磁コイル25に矢印で示した方向に電流
を流し励磁すると、磁極歯■においては永久磁石24の
磁界に電磁石の磁界が加わって磁界が増強され、磁極歯
■においては永久磁石24の磁界と電磁石の磁界とが互
いに打ち消し合って可動子20は第3図(a)の位置に
停止する。このとき磁性材22の方では磁力のバランス
がとれている。
When a current is applied to the excitation coil 25 in the direction shown by the arrow in the magnetic material 21 to excite it, the magnetic field of the electromagnet is added to the magnetic field of the permanent magnet 24 at the magnetic pole tooth ■, and the magnetic field is strengthened. The magnetic field of the magnetic field and the magnetic field of the electromagnet cancel each other out, and the mover 20 stops at the position shown in FIG. 3(a). At this time, the magnetic force of the magnetic material 22 is balanced.

次に第3図0))に示すように励磁コイル26に矢印の
向きに電流を流すと磁極■において磁界が増強され、磁
極■において相殺しあう結果、図示の位置に可動子は停
止する。すなわち矢印の運動方向に1ステツプピツチ(
固定子27の凹凸列の1/4ピツチに等しい)移動した
ことになる。以下同様な方法で第3図(C)及び(d)
に示すように可動子20が移動する。
Next, as shown in FIG. 30)), when a current is passed through the excitation coil 26 in the direction of the arrow, the magnetic field is strengthened at the magnetic pole (2) and canceled at the magnetic pole (2), so that the mover stops at the position shown. In other words, one step pitch (
(equivalent to 1/4 pitch of the row of protrusions and recesses on the stator 27). Below, in the same manner, Figure 3 (C) and (d)
The movable element 20 moves as shown in FIG.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

従来のリニアパルスモータでは、第3図かられかるよう
に、磁極歯■と磁極歯■を励磁するときの磁束の通る磁
気回路と、磁極歯■と磁極歯■を励磁するときの磁束の
通る磁気回路とが異なるため、磁極歯■、■を励磁する
ときの磁気抵抗と、磁極歯■、■を励磁するどきの磁気
抵抗が異なる。
In a conventional linear pulse motor, as shown in Figure 3, there is a magnetic circuit through which magnetic flux passes when exciting magnetic pole teeth ■ and magnetic pole teeth ■, and a magnetic circuit through which magnetic flux passes when exciting magnetic pole teeth ■ and magnetic pole teeth ■. Since the magnetic circuits are different, the magnetic resistance when exciting the magnetic pole teeth ■ and ■ is different from the magnetic resistance when exciting the magnetic pole teeth ■ and ■.

したがって、励磁コイル25.26に同一の電流を印加
したのでは推力の不均衡を引き起こしてしまうため、あ
らかじめ電流値を調べて同一の推力を生ずるように決定
しておく必要がある。
Therefore, if the same current is applied to the excitation coils 25 and 26, an imbalance in thrust will occur, so it is necessary to check the current values in advance and determine so that the same thrust will be generated.

また磁気抵抗の相異によって永久磁石24の両端近くで
の磁気的カップリングによる吸引力と可動子20の両端
付近での吸引力が異なるため、中心付近が歪んでしまい
、可動子20と固定子27との間のギャップの不均衡を
引きおこしてしまう。したがってステップピッチの誤差
を増加させてしまい、さらに永久磁石24と、両側の磁
性材21.22の接着がはがれてしまうという問題点が
ある。
Furthermore, due to the difference in magnetic resistance, the attractive force due to magnetic coupling near both ends of the permanent magnet 24 and the attractive force near both ends of the mover 20 are different, resulting in distortion near the center, which causes the mover 20 and stator to become distorted. This causes an imbalance in the gap between the two. Therefore, there is a problem in that the error in the step pitch increases, and furthermore, the adhesive between the permanent magnet 24 and the magnetic materials 21 and 22 on both sides peels off.

〔発明の目的〕[Purpose of the invention]

本発明の目的は、上述の問題点を解消することにより、
高精度なステップピッチを実現するリニアパルスモータ
を提供することにある。
The purpose of the present invention is to solve the above-mentioned problems.
An object of the present invention is to provide a linear pulse motor that realizes a highly accurate step pitch.

〔発明の構成〕[Structure of the invention]

本発明は、ステップピッチに対応するように凹凸列が形
成された磁性材からなる固定子と、永久磁石と、この永
久磁石の両側に装着され前記固定子の凹凸列と磁気的に
結合する凹凸が形成された2個の磁性材と、これら磁性
材に巻装された励磁コイルとからなる可動子と、 により構成されたリニアパルスモータにおいて、前記固
定子の凹凸列は位相を90℃ずらした2列の凹凸列より
なり、前記固定子の2個の磁性材は、一方の磁性材の凹
凸が一方の凹凸列に近接対向し、他方の磁性材の凹凸が
他方の凹凸列に近接対向するように配列されていること
を特徴としている。
The present invention provides a stator made of a magnetic material on which a row of projections and recesses are formed to correspond to a step pitch, a permanent magnet, and projections and recesses that are attached to both sides of the permanent magnet and magnetically couple with the row of projections and recesses of the stator. In a linear pulse motor, the linear pulse motor is configured by: two magnetic materials formed with a movable element, and an excitation coil wound around these magnetic materials; The two magnetic materials of the stator are composed of two rows of concavo-convex rows, and the concavities and convexities of one magnetic material closely oppose one of the concavo-convex rows, and the concave-convex rows of the other magnetic material closely oppose the other concave-convex row. It is characterized by being arranged as follows.

〔実施例〕〔Example〕

以下本発明の実施例について図面を参照して詳細に説明
する。
Embodiments of the present invention will be described in detail below with reference to the drawings.

第1図は本発明の一実施例を示す概略図である。FIG. 1 is a schematic diagram showing an embodiment of the present invention.

可動子1は永久磁石2と、その両側に装着されたコの字
型の磁性材3,4と、これら磁性材にそれぞれ巻装され
た励磁コイル5.6とから構成されている。
The movable element 1 is composed of a permanent magnet 2, U-shaped magnetic members 3 and 4 attached to both sides thereof, and excitation coils 5 and 6 respectively wound around these magnetic members.

また永久磁石2は磁化7の向きに着磁されている。すな
わち、着磁方向が可動子1の進行方向に垂直となるよう
に着磁されている。
Further, the permanent magnet 2 is magnetized in the direction of magnetization 7. That is, it is magnetized so that the direction of magnetization is perpendicular to the direction in which the movable element 1 moves.

固定子8には、凹凸の1ピツチに対し1/4ピツチすな
わち位相が90°ずれた2列の凹凸列9゜10が形成さ
れている。第4図に固定子8の一部平面図を示す。
On the stator 8, two rows of protrusions and recesses 9° and 10 are formed with a 1/4 pitch, that is, a phase shift of 90° for each pitch of the protrusions and recesses. FIG. 4 shows a partial plan view of the stator 8.

凹凸列9は所定のピッチで繰り返される複数の凹部9a
と凸部9bとからなり、同様に凹凸列10は前記所定の
ピッチで繰り返される複数の凹部10aと凸部10bと
からなる。これら凹凸列9と10は前述したように凹凸
の1ピツチに対し1/4ピツチずれて配列されている。
The concavo-convex row 9 is a plurality of concave portions 9a that are repeated at a predetermined pitch.
Similarly, the concavo-convex row 10 consists of a plurality of concave portions 10a and convex portions 10b repeated at the predetermined pitch. As described above, these rows of recesses and recesses 9 and 10 are arranged with a shift of 1/4 pitch from one pitch of the recesses and recesses.

なお、本実施例では凹凸列9と凹凸列10の対向する凹
部9a、10aのエツジが丸みを持つように形成してい
るが、その理由については後述する。
In this embodiment, the edges of the opposing recesses 9a and 10a of the concavo-convex rows 9 and the concavo-convex rows 10 are formed to have rounded edges, and the reason for this will be described later.

第1図において、可動子1はその進行方向に対して垂直
に、磁性材3.永久磁石2.磁性材4が配列され、磁性
材3の凹凸は固定子8の凹凸列9に近接対向し、磁性材
4の凹凸は固定子8の凹凸列10に近接対向するように
配置されている。
In FIG. 1, the mover 1 is arranged perpendicularly to the moving direction of the mover 1 with the magnetic material 3. Permanent magnet 2. The magnetic materials 4 are arranged such that the concave and convex portions of the magnetic material 3 are close to and opposite to the concave and convex rows 9 of the stator 8 , and the concave and convex portions of the magnetic material 4 are arranged to be close to and opposite to the concave and convex rows 10 of the stator 8 .

以上のような構成のリニアパルスモータでは、可動子1
からの磁束が可動子1の進行方向に対し垂直に固定子8
の内部を通る。その場合最も短い磁路は、凸部9bから
凸部10bへ固定子8の表面近くを通るものである。従
ってこの磁束をスムーズに通過させるためには、2つの
凹凸列9.10の対向する凹部9a、10aのエツジl
la、llbは磁気的飽和による漏れを防ぐため、前述
したように丸みを持つように形成、すなわち丸溝で形成
している。
In the linear pulse motor configured as above, the mover 1
The magnetic flux from the stator 8 is perpendicular to the moving direction of the mover 1.
pass through the interior of In that case, the shortest magnetic path is one that passes near the surface of the stator 8 from the convex portion 9b to the convex portion 10b. Therefore, in order to allow this magnetic flux to pass through smoothly, it is necessary to
In order to prevent leakage due to magnetic saturation, la and llb are formed to have roundness, that is, a round groove, as described above.

第5図は本実施例のリニアパルスモータの断面図を示し
たものであり、第5図(a)は可動子1の磁性材3およ
びこれに対向する固定子8の凹凸列9の部分の断面図で
あり、第5図ら)は可動子1の磁性材4とこれに対向す
る固定子8の凹凸列10の部分の断面図である。コの字
型磁性材3の磁極歯を図示のように■、■とし、コの字
型磁性材4の磁極歯を図示のように■、■とする。なお
、図中5゜6は第1図において説明したように磁性材3
.4にそれぞれ巻装されている励磁コイルである。励磁
コイル5は磁極歯■と■との極性が互いに逆向きとなる
ように巻装されており、励磁コイル6は磁極歯■と■と
の極性が互いに逆向きとなるように巻装されている。
FIG. 5 shows a cross-sectional view of the linear pulse motor of this embodiment, and FIG. 5(a) shows the magnetic material 3 of the movable element 1 and the concavo-convex array 9 of the stator 8 facing it. FIG. 5 is a cross-sectional view of the magnetic material 4 of the movable element 1 and the concavo-convex array 10 of the stator 8 facing thereto. The magnetic pole teeth of the U-shaped magnetic material 3 are denoted by ■ and ■ as shown in the figure, and the magnetic pole teeth of the U-shaped magnetic material 4 are denoted by ■ and ■ as illustrated. In addition, 5°6 in the figure indicates the magnetic material 3 as explained in FIG.
.. The excitation coils are wound around the coils 4 and 4 respectively. The excitation coil 5 is wound so that the polarities of the magnetic pole teeth ■ and ■ are opposite to each other, and the excitation coil 6 is wound so that the polarities of the magnetic pole teeth ■ and ■ are opposite to each other. There is.

本実施例の動作原理は、磁極歯の位相ずれによって駆動
される通常のリニアパルスモータと同じであるが、磁気
的カップリングが、第2図で示した従来のリニアパルス
モータが可動子の進行方向に形成されるのに対し、本発
明では可動子の進行方向に対して垂直方向に形成される
。すなわち、磁極歯■あるいは■から出た磁束は固定子
8を通り、磁極歯■と■とに入る。また、磁極歯■ある
いは■からでた磁束は固定子8を通り、磁極歯■と■と
に入る。これら磁束が通る磁気回路には大きな差違がな
いため、磁気抵抗には大きな違いがない。
The operating principle of this embodiment is the same as that of a normal linear pulse motor driven by a phase shift of the magnetic pole teeth, but the magnetic coupling makes it possible for the conventional linear pulse motor shown in Fig. 2 to advance the mover. In contrast, in the present invention, the movable member is formed perpendicularly to the moving direction of the mover. That is, the magnetic flux emitted from the magnetic pole teeth ■ or ■ passes through the stator 8 and enters the magnetic pole teeth ■ and ■. Further, the magnetic flux coming out from the magnetic pole teeth ■ or ■ passes through the stator 8 and enters the magnetic pole teeth ■ and ■. Since there is no significant difference in the magnetic circuits through which these magnetic fluxes pass, there is no significant difference in magnetic resistance.

したがって励磁コイル5,6に同一の電流を印加しても
、推力の不均衡を引き起こすことがないので、印加電流
供給回路を非常に容易に構成することができる。このた
め、ステップピッチの誤差は機械的精度のみに依存する
こととなる。また磁気抵抗に大きな違いがないため従来
例で問題となった吸引力のアンバランスによる接着のは
がれなども起こらない。さらに、前述したように固定子
8の凹部9 a 、 1Qa(7)エツジlla、ll
bは丸溝で形成されているため、磁気的飽和による磁束
の漏れがな(磁束がスムーズに通過するため、非常に強
い静推力を実現することができる。
Therefore, even if the same current is applied to the excitation coils 5 and 6, an imbalance in thrust does not occur, so that the applied current supply circuit can be configured very easily. Therefore, the step pitch error depends only on mechanical accuracy. Furthermore, since there is no large difference in magnetic resistance, peeling of the adhesive due to unbalanced attractive force, which was a problem in the conventional example, does not occur. Furthermore, as described above, the recesses 9a, 1Qa(7) edges lla, ll of the stator 8
Since b is formed with a round groove, there is no leakage of magnetic flux due to magnetic saturation (magnetic flux passes through smoothly, so a very strong static thrust can be achieved).

本実施例の可動子lを構成する磁性材3,4は、例えば
純鉄のように抗磁力が低く、飽和磁束密度ができるだけ
高いほうがよい。また、永久磁石2は、希上頚以上のエ
ネルギー積を有するものを用いる。この場合、リニアパ
ルスモータの小型化。
It is preferable that the magnetic materials 3 and 4 constituting the mover l of this embodiment have a low coercive force, such as pure iron, and a saturation magnetic flux density as high as possible. Furthermore, the permanent magnet 2 used has an energy product greater than that of a rare magnet. In this case, the miniaturization of linear pulse motors.

薄型化のためには、例えばNEOMAX30(商品名)
程度のエネルギー積があれば固定子と可動子とを合わせ
た高さが7 mm <らいて400g近い静推力が得ら
れる。固定子8も可動子1と同様に純鉄に近い材質が望
ましい。固定子8の2列の凹凸列9゜10の凹凸は、エ
ツチング等により形成でき、ステップピッチの大きい場
合には大きな問題は生じないが、ステップピッチが小さ
くなるにつれ送り精度の悪化が深刻な問題となる。これ
を解決するためには、ワイヤ放電加工あるいは電磁波動
加工といった方法によれば、非常に精度良く凹凸を形成
することができる。
For thinning, for example, NEOMAX30 (product name)
If the energy product is approximately 7 mm, a static thrust of nearly 400 g can be obtained if the combined height of the stator and mover is 7 mm. Like the movable element 1, the stator 8 is also desirably made of a material close to pure iron. The two rows of unevenness rows 9° and 10 on the stator 8 can be formed by etching, etc., and there is no major problem when the step pitch is large, but as the step pitch becomes smaller, the deterioration of feeding accuracy becomes a serious problem. becomes. To solve this problem, a method such as wire electrical discharge machining or electromagnetic wave machining can form irregularities with very high accuracy.

以上、本発明の一実施例を説明したが、当業者であれば
本発明の範囲内で種々の変形、変更が可能なことはもち
ろんである。
Although one embodiment of the present invention has been described above, it goes without saying that those skilled in the art can make various modifications and changes within the scope of the present invention.

〔発明の効果〕〔Effect of the invention〕

本発明のリニアパルスモータは、以上説明したように、
従来問題となっていた磁極歯間の磁気回路のアンバラン
スを改善し、かつ、吸引力のアンバランスによる可動子
の歪あるいは永久磁石と磁性材の接着のはがれ等をなく
し、高静推力でかつ精度よいステップピッチを実現する
ことが可能である。
As explained above, the linear pulse motor of the present invention has the following features:
It improves the unbalance of the magnetic circuit between the magnetic pole teeth, which was a problem in the past, and also eliminates the distortion of the mover due to the unbalance of the attractive force or the peeling of the adhesive between the permanent magnet and the magnetic material. It is possible to realize a highly accurate step pitch.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例を示す概略斜視図、第2図は
従来のリニアパルスモータの概略斜視図、 第3図は第2図のリニアパルスモータの動作原理を説明
する図、 第4図は第1図の実施例における固定子の一部の概略平
面図、 第5図は第1図のリニアパルスモータの断面図である。 1     ・・・・・・ 可動子 2     ・・・・・・ 永久磁石 3.4   ・・・・・・ 磁性材 5.6   ・・・・・・ 励磁コイル8     ・
・・・・・ 固定子 9.10   ・・・・・・ 凹凸列 9a、10a  ・・・・・・ 凹部 9b、10b  ・・・・・・ 凸部 11a、llb  ・・・・・・ 凹部エツジ代理人 
弁理士  岩 佐 義 幸 (a) (b) (C) (d) 第3図
FIG. 1 is a schematic perspective view showing an embodiment of the present invention, FIG. 2 is a schematic perspective view of a conventional linear pulse motor, and FIG. 3 is a diagram explaining the operating principle of the linear pulse motor shown in FIG. 4 is a schematic plan view of a part of the stator in the embodiment of FIG. 1, and FIG. 5 is a sectional view of the linear pulse motor of FIG. 1. 1...Mover 2...Permanent magnet 3.4...Magnetic material 5.6...Exciting coil 8
..... Stator 9.10 ..... Concave and convex rows 9a, 10a ..... Concave portions 9b, 10b ..... Convex portions 11a, llb ..... Concave edges agent
Patent attorney Yoshiyuki Iwasa (a) (b) (C) (d) Figure 3

Claims (2)

【特許請求の範囲】[Claims] (1)ステップピッチに対応するように凹凸列が形成さ
れた磁性材からなる固定子と、 永久磁石と、この永久磁石の両側に装着され前記固定子
の凹凸列と磁気的に結合する凹凸が形成された2個の磁
性材と、これら磁性材に巻装された励磁コイルとからな
る可動子と、 により構成されたリニアパルスモータにおいて、前記固
定子の凹凸列は位相を90℃ずらした2列の凹凸列より
なり、前記固定子の2個の磁性材は、一方の磁性材の凹
凸が一方の凹凸列に近接対向し、他方の磁性材の凹凸が
他方の凹凸列に近接対向するように配列されていること
を特徴とするリニアパルスモータ。
(1) A stator made of a magnetic material on which a row of projections and recesses are formed to correspond to the step pitch, a permanent magnet, and projections and recesses attached to both sides of the permanent magnet that magnetically couple with the row of projections and recesses of the stator. In a linear pulse motor, the linear pulse motor includes a movable element made up of two magnetic materials and an excitation coil wound around these magnetic materials. The two magnetic materials of the stator are arranged such that the projections and recesses of one magnetic material are closely opposed to one row of recesses and recesses, and the recesses and recesses of the other magnetic material are closely opposed to the other row of recesses and recesses. A linear pulse motor characterized by being arranged in.
(2)前記2列の凹凸列の対向する凹部エッジが丸みを
持つことを特徴とする特許請求の範囲第1項に記載のリ
ニアパルスモータ。
(2) The linear pulse motor according to claim 1, wherein opposing edges of the concave portions of the two rows of concavo-convex rows are rounded.
JP25185085A 1985-11-12 1985-11-12 Linear pulse motor Pending JPS62114461A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25185085A JPS62114461A (en) 1985-11-12 1985-11-12 Linear pulse motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25185085A JPS62114461A (en) 1985-11-12 1985-11-12 Linear pulse motor

Publications (1)

Publication Number Publication Date
JPS62114461A true JPS62114461A (en) 1987-05-26

Family

ID=17228847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25185085A Pending JPS62114461A (en) 1985-11-12 1985-11-12 Linear pulse motor

Country Status (1)

Country Link
JP (1) JPS62114461A (en)

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