JPS62114197U - - Google Patents

Info

Publication number
JPS62114197U
JPS62114197U JP1985197023U JP19702385U JPS62114197U JP S62114197 U JPS62114197 U JP S62114197U JP 1985197023 U JP1985197023 U JP 1985197023U JP 19702385 U JP19702385 U JP 19702385U JP S62114197 U JPS62114197 U JP S62114197U
Authority
JP
Japan
Prior art keywords
pump
gas
room
line
turbo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1985197023U
Other languages
English (en)
Japanese (ja)
Other versions
JPH06630Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985197023U priority Critical patent/JPH06630Y2/ja
Publication of JPS62114197U publication Critical patent/JPS62114197U/ja
Application granted granted Critical
Publication of JPH06630Y2 publication Critical patent/JPH06630Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/10—Shaft sealings
    • F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
    • F04D29/104—Shaft sealings especially adapted for elastic fluid pumps the sealing fluid being other than the working fluid or being the working fluid treated

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP1985197023U 1985-12-20 1985-12-20 タ−ボ分子ポンプ Expired - Lifetime JPH06630Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985197023U JPH06630Y2 (ja) 1985-12-20 1985-12-20 タ−ボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985197023U JPH06630Y2 (ja) 1985-12-20 1985-12-20 タ−ボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS62114197U true JPS62114197U (US06623731-20030923-C00012.png) 1987-07-20
JPH06630Y2 JPH06630Y2 (ja) 1994-01-05

Family

ID=31156370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985197023U Expired - Lifetime JPH06630Y2 (ja) 1985-12-20 1985-12-20 タ−ボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPH06630Y2 (US06623731-20030923-C00012.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020084302A1 (en) * 2018-10-25 2020-04-30 Edwards Limited Oil feed assembly for a vacuum pump having a venting conduit

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5874898A (ja) * 1981-10-29 1983-05-06 Shimadzu Corp タ−ボ分子ポンプ
JPS60157994U (ja) * 1984-03-30 1985-10-21 株式会社島津製作所 タ−ボ分子ポンプ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5874898A (ja) * 1981-10-29 1983-05-06 Shimadzu Corp タ−ボ分子ポンプ
JPS60157994U (ja) * 1984-03-30 1985-10-21 株式会社島津製作所 タ−ボ分子ポンプ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020084302A1 (en) * 2018-10-25 2020-04-30 Edwards Limited Oil feed assembly for a vacuum pump having a venting conduit
CN112912629A (zh) * 2018-10-25 2021-06-04 爱德华兹有限公司 用于具有通气导管的真空泵的供油组件
CN112912629B (zh) * 2018-10-25 2023-09-01 爱德华兹有限公司 用于具有通气导管的真空泵的供油组件
US12092126B2 (en) 2018-10-25 2024-09-17 Edwards Limited Oil feed assembly for a vacuum pump having a venting conduit

Also Published As

Publication number Publication date
JPH06630Y2 (ja) 1994-01-05

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