JPS62112844U - - Google Patents

Info

Publication number

JPS62112844U

JPS62112844U JP128386U JP128386U JPS62112844U JP S62112844 U JPS62112844 U JP S62112844U JP 128386 U JP128386 U JP 128386U JP 128386 U JP128386 U JP 128386U JP S62112844 U JPS62112844 U JP S62112844U

Authority

JP

Japan

Prior art keywords

ion beam

focused

aperture

filter

wien filter

Prior art date

1986-01-08

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010884 ion-beam technique Methods 0.000 claims description 11
• 238000010586 diagram Methods 0.000 description 6
• 238000000926 separation method Methods 0.000 description 3
• 238000000605 extraction Methods 0.000 description 1

Cited By (2)