JPS62112139U - - Google Patents
Info
- Publication number
- JPS62112139U JPS62112139U JP20445485U JP20445485U JPS62112139U JP S62112139 U JPS62112139 U JP S62112139U JP 20445485 U JP20445485 U JP 20445485U JP 20445485 U JP20445485 U JP 20445485U JP S62112139 U JPS62112139 U JP S62112139U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- diffusion furnace
- quartz
- fitting part
- unloading
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
Landscapes
- Resistance Heating (AREA)
Description
第１図は本考案の一実施例を示す正面図、第２
図は拡散炉用ヒータ入り石英キヤツプを把手側か
ら見た図である。 １０……拡散炉用ヒータ入り石英キヤツプ、１
１……ヒータ、１５……嵌着部。
図は拡散炉用ヒータ入り石英キヤツプを把手側か
ら見た図である。 １０……拡散炉用ヒータ入り石英キヤツプ、１
１……ヒータ、１５……嵌着部。
Claims (1)
- 拡散炉用石英管のウエハを出し入れする開口部
の外周に嵌着する嵌着部にヒータを備えたことを
特徴とする拡散炉用ヒータ入り石英キヤツプ。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20445485U JPS62112139U (ja) | 1985-12-28 | 1985-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20445485U JPS62112139U (ja) | 1985-12-28 | 1985-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62112139U true JPS62112139U (ja) | 1987-07-17 |
Family
ID=31170460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20445485U Pending JPS62112139U (ja) | 1985-12-28 | 1985-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62112139U (ja) |
-
1985
- 1985-12-28 JP JP20445485U patent/JPS62112139U/ja active Pending