JPS62112138U - - Google Patents
Info
- Publication number
- JPS62112138U JPS62112138U JP3586U JP3586U JPS62112138U JP S62112138 U JPS62112138 U JP S62112138U JP 3586 U JP3586 U JP 3586U JP 3586 U JP3586 U JP 3586U JP S62112138 U JPS62112138 U JP S62112138U
- Authority
- JP
- Japan
- Prior art keywords
- wafer boat
- fork
- wafer
- extraction jig
- nitrogen gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 4
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 6
- 238000000605 extraction Methods 0.000 claims 2
- 238000009792 diffusion process Methods 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000007664 blowing Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3586U JPS62112138U (enExample) | 1986-01-06 | 1986-01-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3586U JPS62112138U (enExample) | 1986-01-06 | 1986-01-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62112138U true JPS62112138U (enExample) | 1987-07-17 |
Family
ID=30776670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3586U Pending JPS62112138U (enExample) | 1986-01-06 | 1986-01-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62112138U (enExample) |
-
1986
- 1986-01-06 JP JP3586U patent/JPS62112138U/ja active Pending