JPS6211170U - - Google Patents
Info
- Publication number
- JPS6211170U JPS6211170U JP9833185U JP9833185U JPS6211170U JP S6211170 U JPS6211170 U JP S6211170U JP 9833185 U JP9833185 U JP 9833185U JP 9833185 U JP9833185 U JP 9833185U JP S6211170 U JPS6211170 U JP S6211170U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum container
- metal vapor
- lower vacuum
- passage
- rising
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 5
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 238000011084 recovery Methods 0.000 claims 2
- 230000000630 rising effect Effects 0.000 claims 2
- 238000001883 metal evaporation Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9833185U JPS6211170U (de) | 1985-06-29 | 1985-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9833185U JPS6211170U (de) | 1985-06-29 | 1985-06-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6211170U true JPS6211170U (de) | 1987-01-23 |
Family
ID=30966163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9833185U Pending JPS6211170U (de) | 1985-06-29 | 1985-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6211170U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008032666A1 (en) * | 2006-09-14 | 2008-03-20 | Ulvac, Inc. | Vacuum evaporation processing equipment |
-
1985
- 1985-06-29 JP JP9833185U patent/JPS6211170U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008032666A1 (en) * | 2006-09-14 | 2008-03-20 | Ulvac, Inc. | Vacuum evaporation processing equipment |
| JPWO2008032666A1 (ja) * | 2006-09-14 | 2010-01-28 | 株式会社アルバック | 真空蒸気処理装置 |