JPS62110544U - - Google Patents
Info
- Publication number
- JPS62110544U JPS62110544U JP19980285U JP19980285U JPS62110544U JP S62110544 U JPS62110544 U JP S62110544U JP 19980285 U JP19980285 U JP 19980285U JP 19980285 U JP19980285 U JP 19980285U JP S62110544 U JPS62110544 U JP S62110544U
- Authority
- JP
- Japan
- Prior art keywords
- dolly
- vacuum
- pressure cylinder
- fluid pressure
- vacuum device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 3
- 239000010802 sludge Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19980285U JPS62110544U (ar) | 1985-12-27 | 1985-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19980285U JPS62110544U (ar) | 1985-12-27 | 1985-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62110544U true JPS62110544U (ar) | 1987-07-14 |
Family
ID=31161766
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19980285U Pending JPS62110544U (ar) | 1985-12-27 | 1985-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62110544U (ar) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013071083A (ja) * | 2011-09-28 | 2013-04-22 | Tokyo Electron Ltd | パーティクル捕集装置及びパーティクルの捕集方法 |
-
1985
- 1985-12-27 JP JP19980285U patent/JPS62110544U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013071083A (ja) * | 2011-09-28 | 2013-04-22 | Tokyo Electron Ltd | パーティクル捕集装置及びパーティクルの捕集方法 |