JPS62110263U - - Google Patents

Info

Publication number

JPS62110263U

JPS62110263U JP20079485U JP20079485U JPS62110263U JP S62110263 U JPS62110263 U JP S62110263U JP 20079485 U JP20079485 U JP 20079485U JP 20079485 U JP20079485 U JP 20079485U JP S62110263 U JPS62110263 U JP S62110263U

Authority

JP

Japan

Prior art keywords

crucible

rotating

fixed table

electron beam

crucibles

Prior art date

1985-12-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005566 electron beam evaporation Methods 0.000 claims 1
• 230000008020 evaporation Effects 0.000 claims 1
• 238000001704 evaporation Methods 0.000 claims 1
• 238000010894 electron beam technology Methods 0.000 description 1
• 238000005192 partition Methods 0.000 description 1

Cited By (1)