JPS62110261U - - Google Patents

Info

Publication number
JPS62110261U
JPS62110261U JP20154785U JP20154785U JPS62110261U JP S62110261 U JPS62110261 U JP S62110261U JP 20154785 U JP20154785 U JP 20154785U JP 20154785 U JP20154785 U JP 20154785U JP S62110261 U JPS62110261 U JP S62110261U
Authority
JP
Japan
Prior art keywords
shutter
vapor deposition
deposition material
crucible
shielding plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20154785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20154785U priority Critical patent/JPS62110261U/ja
Publication of JPS62110261U publication Critical patent/JPS62110261U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP20154785U 1985-12-27 1985-12-27 Pending JPS62110261U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20154785U JPS62110261U (enrdf_load_html_response) 1985-12-27 1985-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20154785U JPS62110261U (enrdf_load_html_response) 1985-12-27 1985-12-27

Publications (1)

Publication Number Publication Date
JPS62110261U true JPS62110261U (enrdf_load_html_response) 1987-07-14

Family

ID=31165104

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20154785U Pending JPS62110261U (enrdf_load_html_response) 1985-12-27 1985-12-27

Country Status (1)

Country Link
JP (1) JPS62110261U (enrdf_load_html_response)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5746131A (en) * 1980-09-05 1982-03-16 Toshiba Corp Detector for abnormality in optical transmission system
JPS58210166A (ja) * 1982-06-02 1983-12-07 Hitachi Ltd スパツタ装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5746131A (en) * 1980-09-05 1982-03-16 Toshiba Corp Detector for abnormality in optical transmission system
JPS58210166A (ja) * 1982-06-02 1983-12-07 Hitachi Ltd スパツタ装置

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