JPS62110260U - - Google Patents

Info

Publication number
JPS62110260U
JPS62110260U JP20046485U JP20046485U JPS62110260U JP S62110260 U JPS62110260 U JP S62110260U JP 20046485 U JP20046485 U JP 20046485U JP 20046485 U JP20046485 U JP 20046485U JP S62110260 U JPS62110260 U JP S62110260U
Authority
JP
Japan
Prior art keywords
vapor deposition
source material
deposition source
crucible
supply device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20046485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20046485U priority Critical patent/JPS62110260U/ja
Publication of JPS62110260U publication Critical patent/JPS62110260U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP20046485U 1985-12-27 1985-12-27 Pending JPS62110260U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20046485U JPS62110260U (enrdf_load_stackoverflow) 1985-12-27 1985-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20046485U JPS62110260U (enrdf_load_stackoverflow) 1985-12-27 1985-12-27

Publications (1)

Publication Number Publication Date
JPS62110260U true JPS62110260U (enrdf_load_stackoverflow) 1987-07-14

Family

ID=31162994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20046485U Pending JPS62110260U (enrdf_load_stackoverflow) 1985-12-27 1985-12-27

Country Status (1)

Country Link
JP (1) JPS62110260U (enrdf_load_stackoverflow)

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