JPS62109498U - - Google Patents
Info
- Publication number
- JPS62109498U JPS62109498U JP19961085U JP19961085U JPS62109498U JP S62109498 U JPS62109498 U JP S62109498U JP 19961085 U JP19961085 U JP 19961085U JP 19961085 U JP19961085 U JP 19961085U JP S62109498 U JPS62109498 U JP S62109498U
- Authority
- JP
- Japan
- Prior art keywords
- transfer means
- guide stand
- substrate transfer
- board
- axis direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 11
- 238000003780 insertion Methods 0.000 claims description 2
- 230000037431 insertion Effects 0.000 claims description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985199610U JPH0328559Y2 (cg-RX-API-DMAC10.html) | 1985-12-27 | 1985-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985199610U JPH0328559Y2 (cg-RX-API-DMAC10.html) | 1985-12-27 | 1985-12-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62109498U true JPS62109498U (cg-RX-API-DMAC10.html) | 1987-07-13 |
| JPH0328559Y2 JPH0328559Y2 (cg-RX-API-DMAC10.html) | 1991-06-19 |
Family
ID=31161394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985199610U Expired JPH0328559Y2 (cg-RX-API-DMAC10.html) | 1985-12-27 | 1985-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0328559Y2 (cg-RX-API-DMAC10.html) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62136447A (ja) * | 1985-12-10 | 1987-06-19 | Nippon Kogaku Kk <Nikon> | 基板の搬送装置 |
-
1985
- 1985-12-27 JP JP1985199610U patent/JPH0328559Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62136447A (ja) * | 1985-12-10 | 1987-06-19 | Nippon Kogaku Kk <Nikon> | 基板の搬送装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0328559Y2 (cg-RX-API-DMAC10.html) | 1991-06-19 |
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