JPS62109464U - - Google Patents
Info
- Publication number
- JPS62109464U JPS62109464U JP20155285U JP20155285U JPS62109464U JP S62109464 U JPS62109464 U JP S62109464U JP 20155285 U JP20155285 U JP 20155285U JP 20155285 U JP20155285 U JP 20155285U JP S62109464 U JPS62109464 U JP S62109464U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- pressure
- strain gauge
- detection device
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 230000035882 stress Effects 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20155285U JPS62109464U (ko) | 1985-12-27 | 1985-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20155285U JPS62109464U (ko) | 1985-12-27 | 1985-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62109464U true JPS62109464U (ko) | 1987-07-13 |
Family
ID=31165113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20155285U Pending JPS62109464U (ko) | 1985-12-27 | 1985-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62109464U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002286567A (ja) * | 2001-03-23 | 2002-10-03 | Denso Corp | ダイアフラムセンサ |
-
1985
- 1985-12-27 JP JP20155285U patent/JPS62109464U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002286567A (ja) * | 2001-03-23 | 2002-10-03 | Denso Corp | ダイアフラムセンサ |
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