JPS62107452U - - Google Patents
Info
- Publication number
- JPS62107452U JPS62107452U JP20219585U JP20219585U JPS62107452U JP S62107452 U JPS62107452 U JP S62107452U JP 20219585 U JP20219585 U JP 20219585U JP 20219585 U JP20219585 U JP 20219585U JP S62107452 U JPS62107452 U JP S62107452U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- grooves
- wall
- expands
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20219585U JPS62107452U (en:Method) | 1985-12-24 | 1985-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20219585U JPS62107452U (en:Method) | 1985-12-24 | 1985-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62107452U true JPS62107452U (en:Method) | 1987-07-09 |
Family
ID=31166349
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20219585U Pending JPS62107452U (en:Method) | 1985-12-24 | 1985-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62107452U (en:Method) |
-
1985
- 1985-12-24 JP JP20219585U patent/JPS62107452U/ja active Pending