JPS62107448U - - Google Patents
Info
- Publication number
- JPS62107448U JPS62107448U JP19839885U JP19839885U JPS62107448U JP S62107448 U JPS62107448 U JP S62107448U JP 19839885 U JP19839885 U JP 19839885U JP 19839885 U JP19839885 U JP 19839885U JP S62107448 U JPS62107448 U JP S62107448U
- Authority
- JP
- Japan
- Prior art keywords
- motion
- vacuum chamber
- rotary shaft
- disposed
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000000149 penetrating effect Effects 0.000 claims 1
Landscapes
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19839885U JPS62107448U (enExample) | 1985-12-25 | 1985-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19839885U JPS62107448U (enExample) | 1985-12-25 | 1985-12-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62107448U true JPS62107448U (enExample) | 1987-07-09 |
Family
ID=31159048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19839885U Pending JPS62107448U (enExample) | 1985-12-25 | 1985-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62107448U (enExample) |
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1985
- 1985-12-25 JP JP19839885U patent/JPS62107448U/ja active Pending